Dynamic Ellipsometry Measurement Based on a Simplified Independent Locking Dual-Comb System

Ruixue Zhang,Liheng Shi,Siyu Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_at.2022.atu5k.6

2022-01-01

Abstract:High-speed and dynamic ellipsometry spectroscopic measurement has been developed with an independent locking dual-comb system. The measurement precision and dynamic performance of the proposed system are demonstrated experimentally.

What problem does this paper attempt to address?

Dynamic ellipsometry measurement based on a simplified phase-stable dual-comb system.

Ruixue Zhang,Liheng Shi,Siyu Zhou,Jinxu Zhang,Bin Liu,Guanhao Wu

DOI: https://doi.org/10.1364/OE.453406

IF: 3.8

2022-01-01

Optics Express

Abstract:Spectroscopic ellipsometry is a powerful tool for characterizing thin film, polarization optics, semiconductors, and others. Conventional approaches are subject to restrictions of mechanical instability and measurement speed. The complex locking scheme of previous dual-comb spectroscopic ellipsometry belies its practicability. We present and demonstrate here dynamic spectroscopic ellipsometry based on a simplified phase-stable dual-comb system, which could realize the online dynamic measurement of optical properties of materials. A precision of 1.31 nm and a combined uncertainty of 13.80 nm (k = 2) in the thickness measurement of thin-film samples has been achieved. Moreover, the dynamic performance of the system is investigated under a high data acquisition rate (1 kHz) with a dynamic resolution of ellipsometric parameter better than 0.1 rad.
Measuring Roll Angle Displacement Based on Ellipticity with High Resolution and Large Range

Peizhe Zhang,Yicong Wang,Cuifang Kuang,Shuai Li,Xu Liu

DOI: https://doi.org/10.1016/j.optlastec.2014.06.011

2015-01-01

Abstract:A novel and compact roll angle displacement measurement based on the principle of the light's polarization is presented. The ellipticity of the light has been chosen as the final output, which shows a good linear relationship with, and a high sensitivity to, the roll angle displacement. In the experiments, a 2.16 '' step roll angle displacement has been recognized by this novel system and the linear range can be extended to 15 degrees. The major components of this system are just a half-wave plate, a quarter-wave plate, a commonly used semiconductor laser, and a detector. Therefore, it is very easy to construct such a system both in the laboratory environment and the actual measurement environment. (C) 2014 Elsevier Ltd. All rights reserved.
A Novel Method to Simultaneously Measure the Straightness

Cuifang Kuang,Qibo Feng,Bin Liu

2004-01-01

Abstract:A precise two-degree-of-freedom measuring system (2DMS) is developed based on single-mode optical fiber, LD, cube corner retroreflector and four-quadrant photodetector (4-Q), and the simultaneous on-line measurement of lateral and vertical direction straightness errors of the linear stage is carried out. The moving part is wireless, which eliminates any errors introduced by pushing and pulling the wires. The sensitivity of the straightness error measurement can be improved by a factor of 2 with the cube corner retroreflector. This fiber-based optically aligned beam is used to establish a reference line for the straightness measurement of any mechanical system. 4-Q detector is used to receive the laser beam. A chip microcomputer is developed to conduct all data acquisition and signal processing. The beam drift influence can be removed in the greatest extent from the system. The experiments on the measurement system stability, repeatability and its comparison with the HP5528 double-frequency laser interferometer are carried out.
Dynamic Spectroscopic Imaging Ellipsometry for Thickness Measurement Based on a Dual-Comb System

Ruixue Zhang,Guanhao Wu,Qian Cong,Di Yuan,Fanxin Sun,Jiang‐Qiao Ding

2023-01-01

Abstract:Lightweight multifunctional devices, such as thin-film antennas and solar sails, are important for lightweight spacecraft development. The thickness and uniformity of thin films directly influence the performance capabilities, and need to be measured and monitored at high speed with high-precision approaches during their fabrication. Imaging ellipsometry is a standard metrology tool for evaluating thin films with the advantages of being non-contact, non-destructive, and sensitive. Conventional imaging ellipsometry using polarization modulation and phase-shifting methods is subject to trade-offs between precision, measurement speed and spectral accuracy. In this paper, we demonstrate a fast and high-precision dual-comb spectroscopic imaging ellipsometry for thin-film thickness uniformity measurement with no moving element by implementing a digital micromirror device (DMD). By utilizing our proposed dual-comb imaging ellipsometry, the spatial resolution of 3 mm × 2 mm and the thickness measurement repeatability of 5.6 nm is obtained within 5 ms, which is three orders of magnitude faster compared with the traditional ways. Our method provides a convenient and efficient solution for high-precision and fast imaging ellipsometry and practicability.
Study of the New Ellipsometric Measurement Method Using Integrated Analyzer in Parallel Mode.

Peng-Hui Mao,Yu-Xiang Zheng,Yue-Rui Chen,Qing-Yuan Cai,Rong-Jun Zhang,Liang-Yao Chen

DOI: https://doi.org/10.1364/oe.17.008641

IF: 3.8

2009-01-01

Optics Express

Abstract:A new type of ellipsometer using an integrated analyzer composed of 12 sub-analyzers with different azimuth angles was constructed and studied. By using a two-dimensional CCD array camera to measure the light intensity emerging in parallel from each sub-analyzer with the azimuth angles uniformly distributed in the range of about 180 degrees , the ellipsometric parameters were extracted within the data acquisition time less than 1 second. The ellipsometric parameters for the polished bulk Si sample were measured to show good agreement with the results measured by using another two ellipsometric methods. The new method having the merits of high speed and reliability in the optical data measurement can be potentially used in the fields where the in situ data acquisition with high precision is the key issue as required.
Dual-optical-comb spectroscopic ellipsometry

Takeo Minamikawa,Yi-Da Hsieh,Kyuki Shibuya,Eiji Hase,Yoshiki Kaneoka,Sho Okubo,Hajime Inaba,Yasuhiro Mizutani,Hirotsugu Yamamoto,Tetsuo Iwata,Takeshi Yasui

DOI: https://doi.org/10.1038/s41467-017-00709-y

2017-05-31

Abstract:Spectroscopic ellipsometry is a means to investigate optical and dielectric material responses. Conventional spectroscopic ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb spectroscopic ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.

Instrumentation and Detectors,Optics
Dynamic Confocal Optical Probe Based on Time Difference Measurement

FAN Yu-ming,ZHANG Guo-xiong,GAO Xiang,QIU Zu-rong,Guo jing-bin,ZHANG Hong-wei,LI Zhi,ZHAO Shu-zhong

DOI: https://doi.org/10.3969/j.issn.0493-2137.2005.05.007

2005-01-01

Abstract:Based on a study on an optical dynamic active confocal probe, a new method of measuring deviation focus is developed in order to meet the increasing requirements of the dimensional control and profile monitoring of the products such as mechanical, optical and electronic ones. The key point of this new method is that displacement of the turning fork is converted to time difference measurement, thus the optical and mechanical structures of the laser probe system can be simplified greatly, and its accuracy and stability are enhanced. Then a new integrated measurement system is designed with error analyzed in detail. Experiments evaluating nonlinearity and measuring range and performance are carried out. Results show that the nonlinearity error is 0.45 μm within the range of ±0.1 mm, and its response is 0.075 μm.
Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

Chen Lin,Siyu Zhou,Ruixue Zhang,Guanhao Wu

DOI: https://doi.org/10.1364/oe.471060

2022-01-01

Abstract:We present a method to measure the refractive index and lens surface spacing in optical systems simultaneously by dual-comb ranging. The repeatability precision of thickness and refractive index is better than 0.18 μm and 1.6×10 -4 .
Dual-Comb Based Two-Dimensional Angle Measurement System

Siyu Zhou,Vunam Le,Kai Ni,Qian Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_si.2020.sm2n.6

2020-01-01

Abstract:We present a dynamic angle measurement method based on dual-comb interferometry that can reach a precision of 0.08 arc-second with 1 kHz response speed. This method can also be applied at long stand-off distances.
High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis

Huatian Tu,Yuxiang Zheng,Yao Shan,Yao Chen,Haotian Zhang,Pian Liu,Haibin Zhao,Rongjun Zhang,Songyou Wang,Jing Li,Hongzhu Yu,YoungPak Lee,Liangyao Chen

DOI: https://doi.org/10.1109/tim.2021.3110323

IF: 5.6

2021-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:We constructed and investigated a high-speed broadband spectroscopic ellipsometric system with 12 polarization channels and a 2-D charge-coupled device. The system without any mechanically moving component completes the measurements of more than 10 000 polarization signals at 889 data points in a wavelength range of 400–800 nm within 150 ms, with a spectral resolution better than 1 nm. An integrated analyzer consisting of 12 subanalyzers was employed to obtain the light of different polarization states simultaneously. The spectral distribution of different polarization channels was acquired by the spectral data acquisition system in parallel mode. Two kinds of data processing methods were applied to analyze the light intensities of different channels to obtain the ellipsometric information and other physical parameters of the material over a broad spectral range. According to the analysis of measurement results of gold and silicon bulk, and tantalum pentoxide film, the reliability of the proposed instrument was verified, showing application prospects in the field where in situ spectral monitoring is required.
Study of Rotation Axis Measurement System Based on PSD

SHAN Xiao-lei,LIU Chao,ZHANG Dong-xian

DOI: https://doi.org/10.3969/j.issn.1005-5630.2007.01.004

2007-01-01

Abstract:A non-contact photoelectricity rotation axis measurement system based on PSD and laser triangulation was developed.This article introduced the principle and setup of the system.Some experiments were carried out to measure the rotational speed and the degree of eccentricity.The results showed that this system could measure accurately not only the rotational speed,but also the degree of eccentricity with theoretical resolution up to 14μm.The relative error was less than 5 percent.This system has advantages of compact structure,accurate detection,and high reliability,and can realize in-situ and real-time measurement.
Dynamic Range Enhanced Optical Frequency Domain Reflectometry Using Dual-Loop Composite Optical Phase-Locking

Yinxia Meng,Weilin Xie,Yuxiang Feng,Jiang Yang,Ling Zhang,Yuanshuo Bai,Wei Wei,Yi Dong

DOI: https://doi.org/10.1109/jphot.2021.3094330

IF: 2.4

2021-08-01

IEEE Photonics Journal

Abstract:We report on a dynamic range enhanced optical frequency domain reflectometry distributed backscattering interrogator based on dual-loop composite optical phase-locked loop (OPLL). Exploiting simultaneously an acousto-optic frequency shifter based an external modulation loop and a piezo based direct modulation loop, the proposed composite OPLL allows offering a larger loop bandwidth and gain, permitting a more efficient coherence enhancement as well as sweep linearization. A high fidelity frequency sweep of ${rm{sim}} text{8.2 GHz}$ at ${text{164 GHz/s}}$ sweep rate is generated with a peak-to-peak frequency error as low as ${rm{sim}} text{120 kHz}$. It leads to a dynamic range enhancement of more than ${text{3 dB}}$ for the measured power loss compared to the case when only piezo loop is applied. This corresponds to ${rm{sim}} text{15 km}$ extension for the measurement range of Rayleigh backscattering without any spatial resolution penalties. Fourier transform-limited spatial resolution has been demonstrated at a range window more than about $text{28}$ times of the intrinsic coherence length of the adopted fiber laser. The proposed method provides a straightforward optimization of the real-time sweep control and is expected to be a useful tool in industrial and commercial applications.

engineering, electrical & electronic,optics,physics, applied
Hybrid Dual-Comb Interferometer Using Electro-Optic Comb and Free-Running Femtosecond Laser

Shuai Wang,Xinyu Fan,Qingwen Liu,Zuyuan He

DOI: https://doi.org/10.1364/cleo_si.2017.sth3l.7

2017-01-01

Abstract:We demonstrate a rapid-scan-rate dual-comb interferometer employing an electro-optic comb generated from Fabry-Perot modulator and a free-running femtosecond laser. High dynamic range has been achieved without the necessity of complicated phase-locking and laser stabilization.
Absolute distance measurement by dual-comb interferometry with multi-channel digital lock-in phase detection

ruitao yang,florian pollinger,karl meinershagen,michael krystek,jiubin tan,harald bosse

DOI: https://doi.org/10.1088/0957-0233/26/8/084001

IF: 2.398

2015-01-01

Measurement Science and Technology

Abstract:We present a dual-comb-based heterodyne multi-wavelength absolute interferometer capable of long distance measurements. The phase information of the various comb modes is extracted in parallel by a multi-channel digital lock-in phase detection scheme. Several synthetic wavelengths of the same order are constructed and the corresponding phases are averaged to deduce the absolute lengths with significantly reduced uncertainty. Comparison experiments with an incremental HeNe reference interferometer show a combined relative measurement uncertainty of 5.3 x 10(-7) at a measurement distance of 20 m. Combining the advantage of synthetic wavelength interferometry and dual-comb interferometry, our compact and simple approach provides sufficient precision for many industrial applications.
High dynamic range electro-optic dual-comb interrogation of optomechanical sensors

D. A. Long,B. J. Reschovsky,T. W. LeBrun,J. J. Gorman,J. T. Hodges,D. F. Plusquellic,J. R. Stroud

DOI: https://doi.org/10.48550/arXiv.2203.16509

2022-03-31

Abstract:An interleaved, chirped electro-optic dual comb system is demonstrated for rapid, high dynamic range measurements of cavity optomechanical sensors. This approach allows for the cavity displacements to be interrogated at measurement times as fast as 10 {\mu}s over ranges far larger than can be achieved with alternative methods. While the performance of this novel readout approach is evaluated with an optomechanical accelerometer, this method is applicable to a wide range of applications including temperature, pressure, and humidity sensing as well as acoustics and molecular spectroscopy.

Optics,Instrumentation and Detectors
Absolute Angular Position Measurement by Dual-Comb Spectroscopy of an Autocollimation Diffracted Beam

Siyu Zhou,Ruilin Jiang,Ruixue Zhang,Liheng Shi,Di Zhang,Guanhao Wu

DOI: https://doi.org/10.1364/ol.479328

IF: 3.6

2023-01-01

Optics Letters

Abstract:The dual-comb technique is a powerful tool in industrial inspection and scientific research and is capable of realizing ultrahigh-resolution and fast broadband spectral measurements. We propose an absolute angular-position measurement method based on dual-comb spectroscopy. With a simple layout, the absolute angular position can be naturally determined through the traceable and wide-amplitude spectra of the autocollimation diffracted beams of the target grating. We experimentally demonstrate that a precision of 0.12 arcsec in the dynamic range of approximately 6660 arcsec, along with a 1 kHz repetition rate difference, is achieved. Compared with a commercial autocollimator, over 1000 arcsec, the comparison residuals are kept within ±0.3 arcsec.
Dynamic spectroscopic characterization for fast spectral variations based on dual asynchronous undersampling with triple optical frequency combs

Jianjun Yang,Jiansheng Liu,Ting Li,Jingyuan Hu,Jingyi Wang,Yuehan Wu,Shuguo Xie,Xin Zhao,Zheng Zheng

DOI: https://doi.org/10.1016/j.optlaseng.2022.107077

IF: 5.666

2022-09-01

Optics and Lasers in Engineering

Abstract:A dynamic spectroscopic characterization scheme for fast spectral variations based on dual asynchronous undersampling with triple optical frequency combs is proposed and demonstrated here. The tri-comb scheme leverages two of the combs to simultaneously sample the fast spectral variations applied to the third comb. The repetition rate differences for both pairs of combs are relatively small, in order to maintain sufficiently large spectral measurement ranges. The corresponding sampling rates could be much slower than a fast time-varying spectral modulation to be measured. Nevertheless, despite of the frequency ambiguity in the undersampled dual-comb results, it is shown that it is possible to identify the original frequency of spectral variations based on the difference in the undersampled frequency domain information. Experimental results show that our scheme can increase the frequency demodulation range by at least two orders of magnitude while retaining the accuracy and spectral measurement range of similar DCS schemes. Demonstration based on a tri-comb mode-locked fiber laser is carried out to measure the dynamic spectral response from a fiber Bragg grating (FBG), to which up to 110 kHz of vibration is applied. This scheme could further extend the capability of dual-comb spectroscopic techniques, and it also illustrates the potential of the low-complexity multi-comb laser source for novel yet practical applications.

optics
In Situ Optic Measuring Technique Based on Virtual Lock-in

何玲平,陈波,杨林,刘世界

DOI: https://doi.org/10.3321/j.issn:1004-924x.2008.09.019

2008-01-01

Optics and Precision Engineering

Abstract:In order to measure the changes of optic characteristics for spacial materials before and after space radiation,a in situ optic measuring system with high precision and wide scanning wavelength was designed to measure feeble signal accurately buried in noise based on a virtual lock-in technique.The system structure,and measuring principle were introduced.Then,the G language Labview was used to develop a program to implement the virtual lock-in technique,and apply it in the system.After that,the light source intensity distribution and the system measuring repetitiveness were measured.Finally,proposed system was used to measure the transparence of a quartz glass.Compared with that of lambda950,the measured results show that the mean error between them is 0.95%.The experimental results indicate that the virtual lock-in technique not only restrains effectively the noise brought by interferential light and electronic equipment,but also simplifies the system structure;This in-situ measuring system by using such technique can accurately measure optic characteristics of spacial materials.
Modified Snapshot Spectroscopic Ellipsometry Based on Optical Frequency-Domain Interferometry

Siyuan Li,Chunmin Zhang,Naicheng Quan

DOI: https://doi.org/10.1016/j.ijleo.2020.166165

IF: 3.1

2021-01-01

Optik

Abstract:We propose a modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry. The proposed system employs only one high-order retarder and a Wollaston prism to analyze the changed state of polarization of the reflected light and can provide the maximum channel bandwidth of the channeled spectroscopic ellipsometry. The spectroscopic ellipsometric parameters of isotropic samples can be accurately measured in a measurement speed of 40 ms without mechanical or active modulation devices. The feasibility of the proposed spectroscopic ellipsometry is demonstrated by experiments.

Dynamic Ellipsometry Measurement Based on a Simplified Independent Locking Dual-Comb System

Dynamic ellipsometry measurement based on a simplified phase-stable dual-comb system.

Measuring Roll Angle Displacement Based on Ellipticity with High Resolution and Large Range

A Novel Method to Simultaneously Measure the Straightness

Dynamic Spectroscopic Imaging Ellipsometry for Thickness Measurement Based on a Dual-Comb System

Study of the New Ellipsometric Measurement Method Using Integrated Analyzer in Parallel Mode.

Dual-optical-comb spectroscopic ellipsometry

Dynamic Confocal Optical Probe Based on Time Difference Measurement

Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

Dual-Comb Based Two-Dimensional Angle Measurement System

High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis

Study of Rotation Axis Measurement System Based on PSD

Dynamic Range Enhanced Optical Frequency Domain Reflectometry Using Dual-Loop Composite Optical Phase-Locking

Hybrid Dual-Comb Interferometer Using Electro-Optic Comb and Free-Running Femtosecond Laser

Absolute distance measurement by dual-comb interferometry with multi-channel digital lock-in phase detection

High dynamic range electro-optic dual-comb interrogation of optomechanical sensors

Absolute Angular Position Measurement by Dual-Comb Spectroscopy of an Autocollimation Diffracted Beam

Dynamic spectroscopic characterization for fast spectral variations based on dual asynchronous undersampling with triple optical frequency combs

In Situ Optic Measuring Technique Based on Virtual Lock-in

Modified Snapshot Spectroscopic Ellipsometry Based on Optical Frequency-Domain Interferometry