Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

Chen Lin,Siyu Zhou,Ruixue Zhang,Guanhao Wu

DOI: https://doi.org/10.1364/oe.471060

2022-01-01

Abstract:We present a method to measure the refractive index and lens surface spacing in optical systems simultaneously by dual-comb ranging. The repeatability precision of thickness and refractive index is better than 0.18 μm and 1.6×10 -4 .

What problem does this paper attempt to address?

A Novel Method to Simultaneously Measure the Straightness

Cuifang Kuang,Qibo Feng,Bin Liu

2004-01-01

Abstract:A precise two-degree-of-freedom measuring system (2DMS) is developed based on single-mode optical fiber, LD, cube corner retroreflector and four-quadrant photodetector (4-Q), and the simultaneous on-line measurement of lateral and vertical direction straightness errors of the linear stage is carried out. The moving part is wireless, which eliminates any errors introduced by pushing and pulling the wires. The sensitivity of the straightness error measurement can be improved by a factor of 2 with the cube corner retroreflector. This fiber-based optically aligned beam is used to establish a reference line for the straightness measurement of any mechanical system. 4-Q detector is used to receive the laser beam. A chip microcomputer is developed to conduct all data acquisition and signal processing. The beam drift influence can be removed in the greatest extent from the system. The experiments on the measurement system stability, repeatability and its comparison with the HP5528 double-frequency laser interferometer are carried out.
Measurement of the Group Refractive Index of Bulk Material Using White-Light Spectral Interferometry

Zhang Shu-Na,Luo Zhen-Yue,Shen Wei-Dong,Liu Xu,Zhang Yue-Guang

DOI: https://doi.org/10.7498/aps.60.014221

IF: 0.906

2011-01-01

Acta Physica Sinica

Abstract:It is a radical but pressing problem to measure the group refractive index of dispersive material both accurately and rapidly in optical engineering field. In this paper, a white-light spectral interferometric system employing a fiber-optic spectrometer is developed for solving this problem. The system takes advantage of the characteristic of fiber-optic spectrometer which can get all the interferometric information by a single shot image without any mechanical scanning. Compared with the traditional windowed Fourier transform, a wavelet transform algorithm is used to directly extract the group delay rather than the phase from the interferogram. Therefore, the new method can provide a simple and fast solution, while still maintaining high accuracy. Based on this white-light Michelson interferometric system, fused silica and BK7 glass samples are measured respectively and the results agree well with the theoretical values over a broad spectral range. At the end of this paper, different mirror positions are used to verify the repeatability of our method.
A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Yongrong Yang

2004-01-01

Abstract:The described optical system,which is used to measure the roughness of ultra smooth surface,forms a common-path interference,so a nondestructive detection can be carried out by it without standard reference plane.In consequence of the way that the optical interference sensor is moved rather than the specimen while measuring,the system can be used to measure the optical component in great dimension.The lateral resolution of measurement system is 0.5μm,and the vertical one is 0.1nm.The repeatability of the system is better than 2%.
Compact Chromatic Confocal Lens with Large Measurement Range

Ning He,Huiqin Hu,Zhiying Cui,Xinjun Xu,Dakai Zhou,Yunbo Chen,Puyin Gong,Youhua Chen,Cuifang Kuang

DOI: https://doi.org/10.3390/s24165122

IF: 3.9

2024-01-01

Sensors

Abstract:Spectral confocal sensors are effective for measuring displacements. The core of the spectral confocal measurement system is a dispersive objective lens that uses optical dispersion to establish a one-to-one correspondence between the focusing position and wavelength, achieving high-resolution measurements in the longitudinal direction. Despite significant progress in dispersive objective lenses for spectral confocal sensor systems, challenges such as a limited dispersion range, high cost, and insufficient measurement accuracy persist. To expand the measurement range and improve the accuracy of the spectral confocal sensor, we designed a compact, long-axial dispersion objective lens. This lens has a simple structure that requires only six lens elements, two of which form cemented doublets. The system length is 58 mm, with a working distance of 46 ± 6 mm and a dispersion range of 12 mm within the wavelength range of 450–656 nm. The lens has an object-side numerical aperture (NA) of 0.22 and an image-side NA between 0.198 and 0.24, ensuring high light energy utilization. Finally, a spectral confocal measurement system was constructed based on the designed dispersive objective lens, and performance evaluation tests were conducted. The test results showed that the system achieved a resolution of 0.15 μm and a maximum linear error of ±0.7 μm, demonstrating high-precision measurement capabilities. The proposed lens design enables the development of more portable and cost-effective spectral confocal sensors.
Optical refractometry using lensless holography and autofocusing.

Yinxu Bian,Yibo Zhang,Pengbin Yin,Haifeng Li,Aydogan Ozcan

DOI: https://doi.org/10.1364/OE.26.029614

IF: 3.8

2018-01-01

Optics Express

Abstract:Conventional optical refractometry methods are often limited by a narrow measurement range, complex hardware, or relatively high cost. Here, we present a novel refractometry method to measure the bulk refractive index (RI) of materials (including solids and liquids) using lensless holographic on-chip imaging and autofocusing, which is simple, cost-effective, and has a large RI measurement range. As a proof of concept, two compact prototypes were built to measure the RIs of solid materials and liquids, respectively, and they were tested by measuring the RIs of a ZnSe plate and a microscopy immersion oil. Experimental results show that our devices have an average accuracy of similar to 3 x 10(-4) RI unit (RIU) with an estimated precision of similar to 3 x 10(-3) RIU for solids; and an average accuracy of similar to 1 x 10(-4) RIU with an estimated precision of similar to 3 x 10(-4) RIU for liquids. We believe that this cost-effective and portable RI measurement platform holds promise to be used in laboratory and industrial settings. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

Ran Zhao,Chong Chen,Xin Xiong,Yuanliu Chen,Bingfeng Ju

DOI: https://doi.org/10.3390/s22249906

IF: 2.398

2024-01-01

Measurement Science and Technology

Abstract:This paper presents a fiber-based chromatic dispersion probe for the simultaneous measurement of dual-axis absolute and relative displacement with nanometric resolutions. The proposed chromatic dispersion probe is based on optical dispersion. In the probe, the employed light beam is split into two sub-beams, and then the two sub-beams are made to pass through two optical paths with different optical settings where two identical single-mode fiber detectors are located at different defocused positions of the respective dispersive lenses. In this way, two spectral signals can be obtained to indicate the absolute displacement of each of the dual-axes. A signal processing algorithm is proposed to generate a normalized output wavelength that indicates the relative displacement of the dual-axis. With the proposed chromatic dispersion probe, the absolute and relative displacement measurements of the dual-axis can be realized simultaneously. Theoretical and experimental investigations reveal that the developed chromatic dispersion probe realizes an absolute measurement range and a measurement resolution of approximately 180 μm and 50 nm, respectively, for each axis. Moreover, a relative displacement measurement range and a measurement resolution of about 240 μm and 100 nm, respectively, are achieved for the dual-axis.
Measurement of the Refractive Index and Thickness for Lens by Confocal Technique

Yun Wang,Lirong Qiu,Jiamiao Yang,Weiqian Zhao

DOI: https://doi.org/10.1016/j.ijleo.2012.08.053

IF: 3.1

2013-01-01

Optik

Abstract:A new confocal measurement for lens refractive index and thickness is proposed based on the property that the peak of an axial intensity curve precisely corresponds to the focus of the objective in a confocal system, which uses the peak of confocal axial response curve to precisely identify the positions of the objective when the measurement pencil is focused on the vertex of the test lens and the reflector with or without the test lens in the measurement light-path, and then uses ray tracing facet iterative calculation to obtain the refractive index and thickness of the test lens simultaneously. The preliminary experiments indicate that the measurement accuracy can reach about 3.8×10−4 for the refractive index and 0.05% for the thickness.
Fast Measurement of the Thickness and Group Refractive Index Distribution of Solid Plates by Line-Field Dispersive Interferometry.

Jinxu Zhang,Shilin Xiong,Ruixue Zhang,Siyu Zhou,Xingyu Jia,Liheng Shi,Bin Liu,Qinggai Mi,Guanhao Wu

DOI: https://doi.org/10.1364/oe.460523

IF: 3.8

2022-01-01

Optics Express

Abstract:Real-time measurement of the thickness and group refractive index is crucial for semiconductor devices. In this paper, we proposed a fast synchronous method for measuring the thickness and group refractive index distribution of solid plates based on line-field dispersive interferometry. The proposed method measured the line-field distribution in an illuminated region through a single step. A low-cost spectrometer calibration method using an eight-channel dense wavelength division multiplexer was developed for verification. The line-field distribution of a three-step silicon wafer was successfully measured within 3.3 ms. The combined uncertainties for the geometrical thickness and group refractive index were <50 nm and 4 × 10-4, respectively.
Laser Differential Confocal Interference Multi-Parameter Comprehensive Measurement Method and Its System for Spherical Lens.

Weiqian Zhao,Lirong Qiu,Yang Xiao,Jiamiao Yang

DOI: https://doi.org/10.1364/oe.24.022813

IF: 3.8

2016-01-01

Optics Express

Abstract:Different measurement methods have been used to achieve different parameter measurements of a spherical lens, and multi-parameter measurements of a spherical lens have low measurement accuracy and efficiency. This paper proposes a new, laser differential confocal interference multi-parameter measurement (DCIMPM) method for spherical lens. Based on this proposed DCIMPM, a multi-parameter comprehensive measurement system is developed for spherical lens, which uses the laser differential confocal parameter measurement technique to measure the radius of curvature, thickness, and refractivity of spherical lens, and uses the laser interference measurement technique to measure the surface figure of a spherical lens. Therefore, the DCIMPM system, for the first time, achieves high-accuracy multi-parameter comprehensive measurements of a spherical lens on a single instrument. Experiments indicate that the developed DCIMPM system can achieve a measurement accuracy of 5 × 10-6 for the lens radius, 2.5 × 10-4 for the lens thickness, 2.2 × 10-4 for the lens refractivity, and a peak to valley of λ/20 for the surface figure of the lens. The proposed DCIMPM principle and developed system provide a new approach to achieve multi-parameter comprehensive measurements for spherical lens.
Synthetic-Wavelength-Based Dual-Comb Interferometry for High-Speed and High-Precision Distance Measurement

Zebin Zhu,Kai Ni,Qian Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_at.2018.atu3i.4

2018-01-01

Abstract:We propose a dual-comb ranging system based on synthetic-wavelength interferometry. It can realize absolute distance measurement with 2.7m ambiguity range, 3nm precision within 10ms averaging time.
Simultaneous Measurement of Double Surfaces of Transparent Lenses with Phase Measuring Deflectometry

Junqiang Ye,Zhenqi Niu,Xiangchao Zhang,Wei Wang,Min Xu

DOI: https://doi.org/10.1016/j.optlaseng.2020.106356

IF: 5.666

2021-01-01

Optics and Lasers in Engineering

Abstract:The phase measuring deflectometry is a promising method for the high precision measurement of optical freeform surfaces. However, it fails to measure the double surfaces of transparent lenses, because the fringes reflected from both the upper and the lower surfaces are superimposed in the captured images. An effective method is proposed to solve this problem by displaying a set of fringe patterns with different frequencies and retrieving the fringe phases associated with both surfaces. The form of the lower surface is reconstructed using a hybrid reflection-refraction model. Experimental results demonstrate that the proposed method can reliably reconstruct both surfaces of a lens, making deflectometry capable of measuring transparent optics with high accuracy.
Long-distance and high-precision ranging with dual-comb nonlinear asynchronous optical sampling

Yun Meng,Yanqing Shi,Kai Zou,Youjian Song,Xiaolong Hu

DOI: https://doi.org/10.1364/oe.527583

IF: 3.8

2024-05-17

Optics Express

Abstract:Yun Meng, Yanqing Shi, Kai Zou, Youjian Song, Xiaolong Hu Precise distance metrology and measurements play an important role in many fields of scientific research and industrial manufacture. ... [Opt. Express 32, 20166-20174 (2024)]

optics
Measurement of Simulated Disk/Slider Stationary Spacing by Common-Path Dual-Frequency Interferometry

Zhao-yang YUE,Rui ZHANG,Shao-xian BAI,Yong-gang MENG,Chun-yong YIN

DOI: https://doi.org/10.3321/j.issn:0258-7025.2005.12.016

2005-01-01

Abstract:A novel method for measuring the simulated disk/slider stationary spacing is proposed in this paper, based on common-path heterodyne interferometry that utilises a transverse Zeeman laser with low beat frequency and a special designed birefringent lens (as beam splitter). The phase measurement technology is adopted to divide half wavelength of light by a factor of 3600, hence a resolution of 0.1 nm can be attained. The experimental results show that in ordinary laboratory condition, without air conditioning, the shift of phase measurement about the stability of system is approximately 4° in a hour, and calibration with a commercial PZT micro-drive working table (step resolution: 1 nm; extent: 1 μm) which drives a mirror (simulative slider), gives the linearly correlation coefficient of 0.9998.
Synthetic-wavelength-based Dual-Comb Interferometry for Fast and Precise Absolute Distance Measurement

Zebin Zhu,Guangyao Xu,Kai Ni,Qian Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/oe.26.005747

IF: 3.8

2018-01-01

Optics Express

Abstract:We present an absolute distance measurement system using a phase-stable dual-comb system with 56.09 MHz repetition rate and 2 kHz repetition rate difference. A relative phase stability of 0.1 rad in 0.5 ms between two combs is achieved using a mutual locking scheme. The dual-comb ranging system combines the time-of-flight (TOF) method, synthetic-wavelength interferometry (SWI), and carrier wave interferometry (CWI). Each method provides a particular ambiguity range and resolution, and they can be applied simultaneously and linked to enhance the precision and measurement rate of the ranging system. The experimental results demonstrate that a precision of 1.2 μm is obtained without time averaging, and the precision can be improved to 3 nm with only 10 ms averaging time using the SWI method described in this study. The precision reaches a sub-nanometer when the averaging time exceeds 0.1 s. A system with high accuracy and short averaging time would enhance fast measurement performance in various industrial applications. The ambiguity range is about 2.67 m in our system, we test the performance of the system with 1.5 mm range at 1.5 m distance.
Dual Comb Ranging: Methodologies, Systems and Applications

Guanhao Wu,Siyu Zhou,Yuetang Yang,Kai Ni

DOI: https://doi.org/10.1364/cleo_si.2023.sth4k.1

2023-01-01

Abstract:Dual-comb ranging is a powerful tool for absolute distance measurement. Here, we introduce dual-comb ranging’s principle, noise suppression technologies, and applications in measuring space camera deformation and satellite antenna.
Single-Photon Counting Laser Ranging with an ElectroOptic Dual-Comb Interferometer

Bo Xu,Xinyi Ren,Qilai Fei,Yan Liang,Ming Yan,Xiaoyue Wang,Heping Zeng

DOI: https://doi.org/10.1364/cleo_at.2020.jtu2g.16

2020-01-01

Abstract:We explore the potential of combining dual-comb interferometry with single-photon detection and counting technologies for precise time-of-flight relative distance measurements with two asynchronous 25-GHz line-spacing combs at the single-photon level.
Ultra-precise determination of thicknesses and refractive indices of optically thick dispersive materials by dual-comb spectroscopy

Kana A. Sumihara,Sho Okubo,Makoto Okano,Hajime Inaba,Shinichi Watanabe

DOI: https://doi.org/10.1364/OE.445134

2022-03-17

Abstract:Precise measurements of the geometrical thickness of a sample and its refractive index are important for materials science, engineering, and medical diagnosis. Among the possible non-contact evaluation methods, optical interferometric techniques possess the potential of providing superior resolution. However, in the optical frequency region, the ambiguity in the absolute phase-shift makes it difficult to measure these parameters of optically thick dispersive materials with sufficient resolution. Here, we demonstrate that dual frequency-comb spectroscopy can be used to precisely determine the absolute sample-induced phase-shift by analyzing the data smoothness. This method enables simultaneous determination of the geometrical thickness and the refractive index of a planar sample with a precision of five and a half digits and an ultra-wide dynamic range. The thickness and the refractive index at 193.414 THz of a silicon wafer determined by this method are 0.52047(3) mm and 3.4756(3), respectively, without any prior knowledge of the refractive index.

Optics
Single-Photon Counting Laser Ranging With Optical Frequency Combs

Xinyi Ren,Bo Xu,Qilai Fei,Yan Liang,Jinman Ge,Xiaoyue Wang,Kun Huang,Ming Yan,Heping Zeng

DOI: https://doi.org/10.1109/lpt.2020.3042499

IF: 2.6

2021-01-01

IEEE Photonics Technology Letters

Abstract:Time-of-flight single-photon counting laser ranging offers an important tool for remote sensing and imaging. However, limited by the temporal properties of a single-photon detection and counting system, it encounters a challenge for high-resolution and high-precision distance metrology. Here, we incorporated dual-comb based laser ranging, an enabling technique for rapid distance measurements with high precision and large range ambiguity, with time-correlated single-photon counting (TCSPC) technology and demonstrated its feasibility for precise laser ranging under a photon-starved condition. Based on interferometric measurements of two asynchronous 2.8-pW, 25-GHz electro-optic laser combs with TCSPC, micrometer-level ranging precision was achieved for consistent distance measurements (a stand-off distance of 15.6 m) over several days. New opportunities might open up for high-resolution and high-precision single-photon counting laser ranging.

engineering, electrical & electronic,optics,physics, applied
Measurement of Refractive Index Homogeneity of Parallel Optical Component

Xu Liu,Yong Liu,Hongzhen Jiang,Huan Ren,Hua Ma,Liqun Chai,Xiaoyu Yang,Bo Chen

DOI: https://doi.org/10.1016/j.ijleo.2014.03.034

IF: 3.1

2014-01-01

Optik

Abstract:In this paper, we present a method for enhancing the measurement capability of refractive index homogeneity for parallel optical components, which phase-shifting interferometry cannot handle with. With the help of wavelength-modulation phase-shifting interferometry, a series of multiple-surface interference fringes are obtained and analyzed by Fourier transform. Based on the fact that the interference fringe corresponding to each interference cavity has its own variation frequency, the wavefront aberrations induced by each interference cavity are obtained and the refractive index homogeneity is then obtained. It is proved by experiment that the enhanced method can measure the refractive index homogeneity of parallel optical components more accurately and conveniently compared with the traditional measurement approach. Therefore, it will have potential application forwards in optical measurement field.

Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

A Novel Method to Simultaneously Measure the Straightness

Measurement of the Group Refractive Index of Bulk Material Using White-Light Spectral Interferometry

A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Compact Chromatic Confocal Lens with Large Measurement Range

Optical refractometry using lensless holography and autofocusing.

A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

Measurement of the Refractive Index and Thickness for Lens by Confocal Technique

Fast Measurement of the Thickness and Group Refractive Index Distribution of Solid Plates by Line-Field Dispersive Interferometry.

Laser Differential Confocal Interference Multi-Parameter Comprehensive Measurement Method and Its System for Spherical Lens.

Synthetic-Wavelength-Based Dual-Comb Interferometry for High-Speed and High-Precision Distance Measurement

Simultaneous Measurement of Double Surfaces of Transparent Lenses with Phase Measuring Deflectometry

Long-distance and high-precision ranging with dual-comb nonlinear asynchronous optical sampling

Measurement of Simulated Disk/Slider Stationary Spacing by Common-Path Dual-Frequency Interferometry

Synthetic-wavelength-based Dual-Comb Interferometry for Fast and Precise Absolute Distance Measurement

Dual Comb Ranging: Methodologies, Systems and Applications

Single-Photon Counting Laser Ranging with an ElectroOptic Dual-Comb Interferometer

Ultra-precise determination of thicknesses and refractive indices of optically thick dispersive materials by dual-comb spectroscopy

Single-Photon Counting Laser Ranging With Optical Frequency Combs

Measurement of Refractive Index Homogeneity of Parallel Optical Component