A Fast and Efficient Method for Permittivity Measurement of Thin‐film Material

Tiancheng Qiu,Kangkang Han,Gao Wei,Siyuan Lei
DOI: https://doi.org/10.1002/mop.33457
IF: 1.311
2022-01-01
Microwave and Optical Technology Letters
Abstract:A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE103 rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.
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