Virtual instrumentation based automatic thin film resistivity measurement system

Yinan Wang,Jianjun Jiang,Shaowei Bie
2008-01-01
Abstract:Comparing with semiconductor material, thin film samples have smaller resistivity and more fragile texture. Existing four probe measurement equipment could not fulfill the measurement requirements of thin film resistivity. Dual-configuration four-probe method is based on thin layer principle, ignores the influence of scale factor and more suitable for thin film samples, but it requires circuit switching in the measurement process and complex calculation in data processing. Visual instrument technique integrates the measurement device and computer, and the measurement process and data processing are accomplished under program control. In this paper a thin film resistivity measurement system is introduced. The stability of the system is proved by test results and the influences of variable environment factors on measurement results are also described.
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