Optical Constants Measurement System for Α:H Silicon Film

Quan Jiang,Zu-lun Lin,Jian-bo Cheng,Kang-cheng Qi,Chang-jun Ge
DOI: https://doi.org/10.1117/12.783833
2007-01-01
Abstract:A type of optical constants measuring system controlled by a computer was developed. The system consists of a focusing lens, a monochromator that is composed of a diffraction grating and a photomultiplier, a high-precision voltage amplifier, a level buffer circuit, a data-sampling card composed of a A/D converting circuits, a interrupt circuit and I/O interface circuits and a PC. The heart of the system is a PC, which is served as data sampling, processing and calculating unit. The transmission spectrum of α:H silicon film is measured by this system. Then, a kind of envelopes calculation method proposed by Manifacier is used to calculate refractive index, absorptive coefficient and optical band. The accuracy is of the same orders as for the iteration method.
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