Measurement of Thermo-optical Coefficient of Amorphous-Si Films by Ellipsometer

CHEN Wei,LIU Shuang,ZENG Pu,LIU Yong,LIU Rongzhi
DOI: https://doi.org/10.16818/j.issn1001-5868.2011.01.019
2011-01-01
Abstract:Based on the theory of ellipsometer,adopting the matching model of Forouhi-Bloomer model,the characteristics of α-Si were analyzed.Utilizing the relations between temperature and band gap,the measurement and the expression of thermo-optical coefficient of α-Si films were obtained.
What problem does this paper attempt to address?