Two‐Dimensional Materials‐Based Static Random‐Access Memory

Chang-Ju Liu,Yi Wan,Lain-Jong Li,Chih-Pin Lin,Tuo-Hung Hou,Zi-Yuan Huang,Vita Pi-Ho Hu
DOI: https://doi.org/10.1002/adma.202107894
IF: 29.4
2021-01-01
Advanced Materials
Abstract:Two-dimensional transition-metal dichalcogenide semiconductors, such as MoS2 and WSe2 , with adequate bandgaps are promising channel materials for ultrascaled logic transistors. This scalability study of two-dimensional material (2DM)-based field-effect transistor (FET) and static random-access memory (SRAM) cells analyzing the impact of layer thickness revealed that the monolayer 2DM FET with superior electrostatics is beneficial for its ability to mitigate the read-write conflict in an SRAM cell at scaled technology nodes (1-2.1 nm). Moreover, the monolayer 2DM SRAM exhibited lower cell read access time and write time than the bilayer and trilayer 2DM SRAM cells at fixed leakage power. Our simulation predicted that the optimization of 2DM SRAM designed with state-of-the-art contact resistance, mobility, and equivalent oxide thickness leads to excellent stability and operation speed at the 1-nm node. Applying the nanosheet gate-all-around (GAA) structure to 2DM further reduced cell read access time and write time and improved the area density of the SRAM cells, demonstrating a feasible scaling path beyond Si technology using 2DM nanosheet FETs. In addition to the device design, the process challenges for 2DM nanosheet FETs, including the cost-effective stacking of 2DM layers, formation of electrical contacts, suspended 2DM channels, and GAA structures, have also been discussed. This article is protected by copyright. All rights reserved.
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