Simulation of 2D ReS2/WSe2 Based Complementary Field-Effect Transistors Towards 1 Nm Technology Node

Chi Zhang,Enlong Li,Hongmiao Zhou,Chenhao Xu,Wenwu Li
DOI: https://doi.org/10.1016/j.mee.2024.112225
IF: 2.3
2024-01-01
Microelectronic Engineering
Abstract:Advanced Integrated Circuit technology demands high-performance channel materials and innovative device architectures to sustain the scaling of field-effect transistors. In this study, we simulate the electrical performance of rhenium disulfide and tungsten diselenide nanosheet FETs (NSFETs) with gate lengths ranging from 12 nm to 8 nm using Technology Computer-Aided Design method. The simulated high performance including 393 mu A/mu m on-state current and over 10(5) on/off ratio can meet the criteria for integrated circuit applications in the 1 nm technology node. Complementary FET (CFET) simulations are conducted through the vertical stacking of ReS2 and WSe2 NSFETs, exhibiting a small parasitic capacitance of 1.0 fF/mu m, and notable noise margin (>235 mV) at different process corners. The construction and performance simulation of Static Random-Access Memory (SRAM) is realized through CFET interconnection, involving the calculation of read current and read/write noise margin. This research offers a forward-looking analysis of performance metrics for future 2D materials-based NSFETs, CFETs, and SRAMs.
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