High-Performance Silicon Nitride Fork-shape Edge Coupler

Xin Mu,Sailong Wu,Lirong Cheng,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1364/fio.2019.jtu3a.66

2019-01-01

Abstract:We propose a fork-shape edge coupler based on silicon nitride for silicon photonic platform. The coupler exhibits low coupling loss, compact size and relaxed misalignment tolerance for both TE and TM modes.

What problem does this paper attempt to address?

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

Yunfei Fu,Zhiyong Li,Tao Chu,Yude Yu,Jinzhong Yu,Qingbo Li

DOI: https://doi.org/10.1364/iont.2012.if2a.6

2012-01-01

Abstract:CMOS-compatible broad-band and efficient edge couplers are presented in this paper. The couplers are based on SiON ridge waveguides and silicon inverted tapers, no requirement on partially etching in fabrication processes. The measured coupling losses of ~ 2dB are proved with the calculation results, the broad-band range of more than 100nm range.
A Compact Adiabatic Silicon Photonic Edge Coupler Based on Silicon Nitride/Silicon Trident Structure

Xin Mu,Sailong Wu,Lirong Cheng,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/ICOCN.2019.8934126

2019-01-01

Abstract:We propose a novel compact adiabatic fiber-to-chip edge coupler based on a silicon nitride/silicon trident structure. The edge coupler can achieve high coupling efficiency up to 81% (namely 0.91 dB) with 3.2-μm lensed fiber in an ultra-broad bandwidth covering both the O-band and the C-band. It enables adiabatic mode conversion with a total length as short as 80 μm. The silicon nitride/silicon edge coupler is compatible with CMOS process and fabrication tolerance is also analysed for future fabrication and measurement.
High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

Ziliang Ruan,Kaixuan Chen,Zong Wang,Xuancong Fan,Ranfeng Gan,Lu Qi,Yiwei Xie,Changjian Guo,Zhonghua Yang,Naidi Cui,Liu Liu

DOI: https://doi.org/10.1002/lpor.202200327

2023-01-01

LASER & PHOTONICS REVIEWS

Abstract:Silicon nitride (SiN) emerges as an important platform for ultralow loss photonic integrations with complementary metal-oxide-semiconductor compatibility. However, active devices, such as modulators, are difficult to realize on pure SiN due to the lack of any electro-optic (EO) properties of the material. Here, an SiN and lithium niobate (LN) heterogenous integration platform supporting high-performance EO modulators on SiN waveguide circuits is introduced. An efficient evanescent coupling structure is realized for low-loss light transitions between the SiN waveguide and the LN ridge waveguide with a measured mode transition loss of only 0.4 dB. Based on this heterogeneous platform, an EO Mach-Zender interference modulator on SiN is built with unprecedented loss, efficiency, and bandwidth performances. A half-wave voltage of 4.3 V with a modulation bandwidth of 37 GHz and an overall insertion loss of 1 dB is measured for a 7-mm long device. Data transmission up to 128 Gb s(-1) with a bit-error-rate of <2.4 x 10(-4) is also demonstrated.
High-Performance Vertical Interlayer Coupler for Multilayer Silicon Nitride-on-Silicon Photonic Platform

Xin Mu,Sailong Wu,Lirong Cheng,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1109/group4.2019.8925686

2019-01-01

Abstract:We propose a vertical interlayer coupler for optical interconnections in multilayer silicon nitride-on-silicon photonic circuits with coupling efficiency of 96.0%. The coupler has a compact size of 170 μm in length and exhibits high performance in an ultra-broad bandwidth.
Y-branch Edge Coupler Between Cleaved Single Mode Fiber and Nano-Scale Waveguide on Silicon-on-insulator Platform

Xin Tu,Hongyan Fu,Dongyu Geng

DOI: https://doi.org/10.1364/acpc.2014.ath3a.10

2014-01-01

Abstract:A novel edge coupler between a cleaved fiber and a nano-scale waveguide is proposed. The simulated lowest coupling loss is 0.5 dB and 1.0 dB for TE and TM modes with large 3-dB alignment tolerance.
Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1109/cleopr.2017.8118727

2017-01-01

Abstract:Grating coupler, as one of the key components can provide convenient on-wafer testing and packaging for integrated photonics. Silicon nitride (SiNx) grating coupler suffers from lower efficiency due to the relative low material refractive index. The efficiency of SiNx grating coupler can be improved by using high reflectivity silicon grating reflectors underneath. However, such silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this work, we demonstrate an easy-to-fabricate SiNx grating coupler only requiring a single patterning step without the need of HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm have been experimentally measured.
CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

Zhen Wang,Jin Zhang,Lei Zhang,Xiaoke Ruan,Weijie Tang,Tao Chu

DOI: https://doi.org/10.3390/mi14010066

IF: 3.4

2022-01-01

Micromachines

Abstract:Edge coupler is a key component of silicon-based optoelectronic chips, which dramatically reduces the coupling loss between fibers and transmission waveguides. Here, we propose an ultralow-loss three-step silicon edge coupler based on a 130 nm CMOS process. By replacing the silicon substrate with a material with a lower refractive index than silicon oxide, the silicon leakage loss and polarization-dependent loss can be significantly improved. This structure avoids the existence of a cantilever, which enhances the mechanical strength of the edge coupler. Coupling with standard single-mode fiber, the simulation results demonstrate that the TE/TM mode has an ultralow loss of 0.63/1.08 dB at 1310 nm and 0.57/1.34 dB at 1550 nm, and the 0.5 dB bandwidth covering the entire communication band is about 400 nm. In the entire communication band, the polarization-dependent loss is less than 0.8 dB. Furthermore, we propose a taper shape design method based on mode analysis, which can be adapted for any taper to improve its compactness. Compared with the parabolic shape, the coupling loss of the edge coupler with a length of 460 μm for the TE mode is improved by 0.3 dB on average, this edge coupler provides a feasible solution for fiber-to-chip coupling and is perfectly suitable for wavelength division multiplexing applications in optical communications.
High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
A novel polished conical silicon-cored-fiber based edge coupler for silicon photonics

C. Wu,Sung-Pu Yang,Lon A. Wang

DOI: https://doi.org/10.1109/OECC56963.2023.10209625

2023-07-02

Abstract:A silicon-cored-fiber (SCF) is proposed for coplanar light coupling from an incoming fiber to a silicon waveguide. The simulation results show that an optimized polished conical SCF coupler can have high coupling efficiencies in both TE and TM modes and with low polarization penalty.

Engineering,Physics
Ltra-Compact Silicon Photonic Edge Coupler Based On Subwavelength Gratings

Xin Mu,Sailong Wu,Lirong Chong,Xin Tu,H. Y. Fu

2019-01-01

Abstract:Wc present an ultra -compact fork -shape cdgc coupler based on subwavelength gratings stnicture. This cdgc coupler achieves a high efficiency of 77% with only 36.5 mm in length, exhibiting stable bandwidth feature and large fabrication tolerance.
High-efficiency edge couplers enabled by vertically tapering on lithium-niobate photonic chips

Di Jia,Qiang Luo,Chen Yang,Rui Ma,Xuanyi Yu,Feng Gao,Qifan Yang,Fang Bo,Guoquan Zhang,Jingjun Xu

2023-11-10

Abstract:In the past decade, photonic integrated circuits (PICs) based on thin-film lithium niobate (TFLN) have advanced in various fields, including optical communication, nonlinear photonics, and quantum optics. A critical component is an efficient edge coupler connecting PICs to light sources or detectors. Here, we propose an innovative edge coupler design with a wedge-shaped TFLN waveguide and a silicon oxynitride (SiON) cladding. Experimental results show that the coupling loss between the TFLN PIC and a 3-{\mu}m mode field diameter (MFD) lensed fiber is low at 1.52 dB/facet, with the potential for improvement to 0.43 dB/facet theoretically. The coupling loss between the edge coupler and a UHNA7 fiber with an MFD of 3.2 {\mu}m is reduced to 0.92 dB/facet. This design maintains robust fabrication and alignment tolerance. Importantly, the minimum linewidth of the TFLN waveguide of the coupler (600 nm) can be easily achieved using foundry-available i-line stepper lithography. This work benefits the development of TFLN integrated platforms, such as on-chip electro-optic modulators, frequency comb generation, and quantum sensors.

Optics,Applied Physics
Broadband and easily fabricated double-tip edge coupler based on thin-film lithium niobate platform

Wanghua Zhu,Chunyu Deng,Dongyu Wang,Qichao Wang,Yaohui Sun,Jin Wang,Binfeng Yun,Guohua Hu,Yiping Cui

DOI: https://doi.org/10.1016/j.optcom.2024.131031

IF: 2.4

2024-08-30

Optics Communications

Abstract:Due to the significant difference in spot size between lithium-niobate-on-insulator (LNOI) waveguide and fiber, there is a substantial coupling loss between them, which limits the interconnection and application of LN photonic chips. Although some LNOI edge couplers have been designed and fabricated with low coupling loss between chip and fiber, they require high etching accuracy. In this paper, a low-loss, broadband and easily fabricated edge coupler is designed and fabricated on the LNOI platform. To reduce the etching requirement for tip width, a design has been adopted with symmetrical double tips at the edge. Additionally, a multimode interferometer (MMI) is introduced to ensure large fabrication tolerance. The proposed design only requires a single full etching step, significantly reducing stringent requirements for process with high precise. Experimental results demonstrate that the device exhibits a coupling loss less than 3.5 dB/facet in the wavelength range of 1500 to 1640 nm, while achieving a low coupling loss of 2.71dB /facet at 1550 nm.

optics
Compact and efficient coupler to interface hybrid dielectric-loaded plasmonic waveguide with silicon photonic slab waveguide

rakesh g mote,hongson chu,ping bai,erping li

DOI: https://doi.org/10.1016/j.optcom.2012.04.037

IF: 2.4

2012-01-01

Optics Communications

Abstract:A coupler is proposed to interface a hybrid dielectric-loaded plasmonic waveguide (HDLPW) with a silicon photonic slab waveguide. The HDLPW is firstly designed and optimized to attain the best tradeoff between the mode confinement and the propagation distance. The designed coupler is inspired from the taper configuration and numerically modeled through finite-difference time-domain (FDTD) simulation. The results demonstrate that a high confinement and low loss of the energy is achieved from a silicon photonic slab waveguide into the dielectric slot of area 50×200nm2 in the HDLPW. The transmission attained through the coupler with a compact size of 400nm is found to be as high as 80% (1dB). Further, the planar nature of taper configuration makes the coupler easy to fabricate using the state-of-the-art CMOS facilities. The proposed coupler is useful in enabling the integration between photonic and hybrid plasmonic waveguides and thus realizing on-chip hybrid integrated circuits.
High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

Yang Chen,Robert Halir,Inigo Molina-Fernandez,Pavel Cheben,Jian-Jun He

DOI: https://doi.org/10.1364/ol.41.005059

2016-01-01

Abstract:Chip-fiber grating couplers have been widely used in silicon-on-insulator platforms. In silicon nitride waveguides, the lower index contrast yields gratings with a weaker radiation strength and poor directionality, thereby limiting the coupling efficiency. Here we propose and design an apodized self-imaging grating coupler in silicon nitride that images an in-plane waveguide input to an output optical fiber placed at a specific distance above the chip. Both amplitude and phase apodizations are employed to engineer the transfer function of the self-imaging grating to produce an image field matching the fiber mode profile. Two-step etch staircase grating teeth are used to achieve directionality as high as 93%. Full three-dimensional finite-difference time-domain simulations show coupling from a 40 μm×40 μm grating to an SMF-28 single mode fiber with a record calculated efficiency of 86% (0.66 dB loss) and a 3 dB bandwidth of 40 nm near the 1550 nm wavelength.
High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Ping Yu,Huiye Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2016.2581205

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate the design, fabrication, and characterization of side-coupled airmode nanobeam photonic crystal cavities in silicon-on-insulator platform. Results show that repeatable devices achieve similar high loaded quality factors (>10(4)) and large optical energy ratio in low refractive region. The unload Q-factors of the fabricated cavities are estimated to exceed 10(5). With side-coupled configuration, high transmission of through port is achieved with typical insertion loss less than 0.5 dB. Wavelength shifts of the measured resonances with respect to the designed values are observed and well explained by considering the fluctuation of etching depth. The demonstrated side-coupled airmode nanobeam photonic crystal cavities may find their applications in ultracompact integrated photonics, especially for on-chip photonic sensor, notch filter, or optical switch.
Edge Couplers in Silicon Photonic Integrated Circuits: A Review

Xin Mu,Sailong Wu,Lirong Cheng,H. Y. Fu

DOI: https://doi.org/10.3390/app10041538

2020-01-01

Abstract:Silicon photonics has drawn increasing attention in the past few decades and is a promising key technology for future daily applications due to its various merits including ultra-low cost, high integration density owing to the high refractive index of silicon, and compatibility with current semiconductor fabrication process. Optical interconnects is an important issue in silicon photonic integrated circuits for transmitting light, and fiber-to-chip optical interconnects is vital in application scenarios such as data centers and optical transmission systems. There are mainly two categories of fiber-to-chip optical coupling: off-plane coupling and in-plane coupling. Grating couplers work under the former category, while edge couplers function as in-plane coupling. In this paper, we mainly focus on edge couplers in silicon photonic integrated circuits. We deliver an introduction to the research background, operation mechanisms, and design principles of silicon photonic edge couplers. The state-of-the-art of edge couplers is reviewed according to the different structural configurations of the device, while identifying the performance, fabrication feasibility, and applications. In addition, a brief comparison between edge couplers and grating couplers is conducted. Packaging issues are also discussed, and several prospective techniques for further improvements of edge couplers are proposed.
High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Xiangyu Luo,Guangcan Mi,Yanbo Li,Tao Chu

DOI: https://doi.org/10.1364/ol.452054

IF: 3.6

2022-01-01

Optics Letters

Abstract:We experimentally demonstrated a high-efficiency grating coupler by combining an interleaved etch and apodized structure for fiber-to-chip coupling. The grating coupler was optimized using the fast directional optimization method to achieve apodization. The grating coupler utilized a layout strategy involving an extended mask to avoid alignment errors for a multi-etch structure. The coupling efficiency was measured to be -2.2 dB at a wavelength of 1549 nm with a 3 dB bandwidth of 47 nm. The grating coupler, having no gold reflector, subwavelength index matching structure, or additional material layers, was fabricated using a commercial silicon photonics process with a minimum feature size of 140 nm. This grating coupler design provides a robust and effective coupling scheme and the proposed method can be employed to adopt the design in accordance with standard foundry design rules.
Effects of Fabrication Deviations and Fiber Misalignments on a Fork-Shape Edge Coupler Based on Subwavelength Gratings

Xin Mu,Zhenmin Chen,Lirong Cheng,Sailong Wu,Alberto Pepe,Xin Tu,H. Y. Fu

DOI: https://doi.org/10.1016/j.optcom.2020.126562

IF: 2.4

2021-01-01

Optics Communications

Abstract:We demonstrate a fork-shape edge coupler consisting of a two-tip taper and subwavelength gratings for optical interconnects in optical communication scenarios. The proposed fiber-to-chip edge coupler can achieve a low coupling loss of around 1.0 dB at 1550 nm wavelength for TE mode. The edge coupler also presents a stable performance over a 100-nm wavelength range, owing to the high degree of freedom of subwavelength gratings. The effects of fabrication deviations and fiber misalignments on the coupler are investigated and analyzed in detail. Three types of potential deviations during the fabrication process are taken into consideration, including the distance deviation between coupler facet and the chip facet, lithography deviations, and surface roughness of the chip facet. As for the discussions about the effects of fiber misalignments, both the spatial displacement and the angular misalignment of the optical fiber are included. Simulation results indicate that the fabrication deviations can have certain impacts on the coupling performances and the edge coupler is tolerant to the fiber misalignments. Our numerical simulations and theoretical analysis can provide useful guidance for the fabrication processes and experimental measurements of the proposed edge coupler.
Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Yang Chen,Thalia Dominguez Bucio,Ali Z. Khokhar,Mehdi Banakar,Katarzyna Grabska,Frederic Y. Gardes,Robert Halir,Inigo Molina-Fernandez,Pavel Cheben,Jian-Jun He

DOI: https://doi.org/10.1364/ol.42.003566

2017-01-01

Abstract:A silicon nitride waveguide is a promising platform for integrated photonics, particularly due to its low propagation loss compared to other complementary metal-oxide-semiconductor compatible waveguides, including silicon-on-insulator. Input/output coupling in such thin optical waveguides is a key issue for practical implementations. Fiber-to-chip grating couplers in silicon nitride usually exhibit low coupling efficiency because the moderate index contrast leads to weak radiation strengths and poor directionality. Here, we present the first, to the best of our knowledge, experimental demonstration of a recently proposed apodized-imaging fiber-to-chip grating coupler in silicon nitride that images an in-plane waveguide mode to an optical fiber placed at a specific distance above the chip. By employing amplitude and phase apodization, the diffracted optical field of the grating is matched to the fiber mode. High grating directionality is achieved by using staircase grating teeth, which produce a blazing effect. Experimental results demonstrate an apodized-imaging grating coupler with a record coupling efficiency of -1.5 dB and a 3 dB bandwidth of 60 nm in the C-band. (C) 2017 Optical Society of America
Ultralow-loss polarization-insensitive silicon nitride-assisted double-etched silicon edge coupler with polarization splitting

Zhen Wang,Huan Zhang,Cun-Zheng Ning

DOI: https://doi.org/10.1364/oe.527904

IF: 3.8

2024-06-14

Optics Express

Abstract:Zhen Wang, Huan Zhang, Cun-Zheng Ning High-performance silicon-based edge couplers for interfacing with standard single-mode fibers encounter significant challenges due to ... [Opt. Express 32, 23803-23811 (2024)]

optics

High-Performance Silicon Nitride Fork-shape Edge Coupler

Broad-band Efficient Edge Couplers for Compact Silicon Photonic Circuits

A Compact Adiabatic Silicon Photonic Edge Coupler Based on Silicon Nitride/Silicon Trident Structure

High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

High-Performance Vertical Interlayer Coupler for Multilayer Silicon Nitride-on-Silicon Photonic Platform

Y-branch Edge Coupler Between Cleaved Single Mode Fiber and Nano-Scale Waveguide on Silicon-on-insulator Platform

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

A novel polished conical silicon-cored-fiber based edge coupler for silicon photonics

Ltra-Compact Silicon Photonic Edge Coupler Based On Subwavelength Gratings

High-efficiency edge couplers enabled by vertically tapering on lithium-niobate photonic chips

Broadband and easily fabricated double-tip edge coupler based on thin-film lithium niobate platform

Compact and efficient coupler to interface hybrid dielectric-loaded plasmonic waveguide with silicon photonic slab waveguide

High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Edge Couplers in Silicon Photonic Integrated Circuits: A Review

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Effects of Fabrication Deviations and Fiber Misalignments on a Fork-Shape Edge Coupler Based on Subwavelength Gratings

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Ultralow-loss polarization-insensitive silicon nitride-assisted double-etched silicon edge coupler with polarization splitting