P‐46: Fabrication and Characterization of Thick Cu Films Deposited on G8.5 LCD Glass Substrates for 8k and Large TV Panels

Guo Li,Xia Hui,Tan Zhiwei,Xiao Juncheng,Zhou Hang
DOI: https://doi.org/10.1002/sdtp.14177
2020-01-01
Abstract:The deposition of thick Cu films on large glass substrates, for instance G8.5 and G10.5 is challenging but essential for large size and 8k TV sets. The inevitable temperature rising during metal deposition results in a series of severe issues such as film oxidation and glass bending, which have been seldom investigated. In the paper, the process issues leading by thick Cu film deposition have been disclosed and solutions have been discussed. Film properties as surface roughness, grain size and electrical resistivity have been characterized and the results will help improve the performance of thick Cu wires.
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