Molecular Dynamics Characterization of a Force Sensor Integrated Fast Tool Servo for On-Machine Surface Metrology

Yindi Cai

DOI: https://doi.org/10.1007/978-981-10-4938-5_21

2019-01-01

Abstract:Establishment of the tool-workpiece contact, in which the diamond tool is set on the workpiece surface with a small contact force, determines the depth of cut accuracy in a force sensor-integrated fast tool servo (FS-FTS) for single point diamond microcutting and the scan force and scan depth in the following step of on-machine surface metrology. Molecular dynamics (MD) simulations are carried out to characterize the tool-workpiece contact process. It is clarified that even a small instability induced by the vibration of the workpiece atoms can generate large uncertainties in the subnanometric MD simulation results. Based on the vibration of the workpiece, atoms have a certain period determined by the MD model size; a multi-relaxation time method is proposed for reduction of the atom vibrations and stabilization of the MD model. It is confirmed that the proposed multi-relaxation time method is effective to eliminate the instability over a wide temperature range up to room temperature under which a practical microcutting or surface metrology process is carried out. An accurate elastic-plastic transition contact depth is then evaluated by observing the residual defects on the workpiece surface after the diamond tool is retracted back to its initial position.