Study on X-ray irradiation induced effect of phase-change material Ge2Sb2Te5

HE Peiyao,ZHAO Yue,LIU Yu,WANG Bo,ZHU Xiaoli
DOI: https://doi.org/10.11889/j.0253-3219.2021.hjs.44.030102
2021-01-01
Nuclear Techniques
Abstract:BackgroundDue to its unique optical and electrical properties, phase-change material Ge2Sb2Te5 (GST) has been widely used in optical recording, data storage, etc. In some specific environments, such as the space and security inspection channels, X-ray irradiation can change the structure and properties of GST.PurposeThis study aims to investigate the X-ray irradiation induced effect of GST.MethodsThe 50 nm thick GST films sputtered on Si substrates were irradiated for different times by an X-ray source of the synchrotron radiation facility, and the changes in chemical states and structures of the films were analyzed by using X-ray photoelectron spectroscopy (XPS).ResultsWith the increasing of irradiation time, the peak intensity of GeO2 is enhanced, and Sb2O3 and TeO2 are transformed into higher metal oxides Sb2O5 and TeO3, respectively. Which indicated the chemical states and the bonds of each element changed, and the degree of oxidation increases. After 9-h irradiation, a large number of holes can be seen on the film surface. It means that the limit of irradiation time of Ge2Sb2Te5 is 9 h.ConclusionsX-ray irradiation on GST is an effective method to alter the chemical states and structures of GST, it provides a reference for the research of radiation resistance mechanism and radiation hardening technology of GST.
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