Investigation of Lateral Spreading Current in the 4H-Sic Schottky Barrier Diode Chip

Xi Wang,Yiwen Zhong,Hongbin Pu,Jichao Hu,Xianfeng Feng,Guowen Yang
DOI: https://doi.org/10.1088/1674-4926/42/11/112802
2021-01-01
Journal of Semiconductors
Abstract:Lateral current spreading in the 4H-SiC Schottky barrier diode(SBD) chip is investigated. The 4H-SiC SBD chips with the same vertical parameters are simulated and fabricated. The results indicate that there is a fixed spreading resistance at onstate in current spreading region for a specific chip. The linear specific spreading resistance at the on-state is calculated to be8.6 Ω/cm in the fabricated chips. The proportion of the lateral spreading current in total forward current(P sp ) is related to anode voltage and the chip area. P sp is increased with the increase in the anode voltage during initial on-state and then tends to a stable value. The stable values of P sp of the two fabricated chips are 32% and 54%. Combined with theoretical analysis, the proportion of the terminal region and scribing trench in a whole chip(K sp ) is also calculated and compared with P sp . The Ksp values of the two fabricated chips are calculated to be 31.94% and 57.75%. The values of Ksp and P sp are close with each other in a specific chip. The calculated Ksp can be used to predict that when the chip area of SiC SBD becomes larger than 0.5 cm 2 , the value of P sp would be lower than 10%.
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