Abstract:With the arrival of the Fifth Generation (5G) communication era, there has been an urgent demand for acoustic filters with a high frequency and ultrawide bandwidth used in radio-frequency (RF) front-ends filtering and signal processing. First-order antisymmetric (A1) lamb mode resonators based on LiNbO3 film have attracted wide attention due to their scalable, high operating frequency and large electromechanical coupling coefficients (K2), making them promising candidates for sub-6 GHz wideband filters. However, A1 mode resonators suffer from the occurrence of transverse modes, which should be addressed to make these devices suitable for applications. In this work, theoretical analysis is performed by finite element method (FEM), and the admittance characteristics of an A1 mode resonator and displacement of transverse modes near the resonant frequency (fr) are investigated. We propose a novel Dielectric-Embedded Piston Mode (DEPM) structure, achieved by partially etching a piezoelectric film filled with SiO2, which can almost suppress the transverse modes between the resonant frequency (fr) and anti-resonant frequency (fa) when applied on ZY-cut LiNbO3-based A1 mode resonators. This indicates that compared with Broadband Piston Mode (BPM), Filled-broadband Piston Mode (FPM) and standard structures, the DEPM structure is superior. Furthermore, the design parameters of the resonator are optimized by adjusting the width, depth and filled materials in the etched window of the DEPM structure to obtain a better suppression of transverse modes. The optimized A1 mode resonator using a DEPM structure exhibits a transverse-free response with a high fr of 3.22 GHz and a large K2 of ~30%, which promotes the application of A1 mode devices for use in 5G RF front-ends.

Comparative Study of Traditional and Broadband Piston Mode Designs of A1-Mode Resonators on Lithium Niobate

Broadband Piston Mode Operation of Solidly Mounted Resonator Employing A1 Lamb Mode on Lithium Niobate

Comparative Study of Piston Mode Designs for Temperature-Compensated Surface Acoustic Wave Resonators Using SiO2/LiNbO3 Structure

Broadband Piston Mode Operation for First-order Antisymmetric Mode Resonators

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Revisiting Piston Mode Design for Radio Frequency Surface Acoustic Wave Resonators

Transverse Mode Suppression for S0-Like SAW Mode Resonator

Transverse Mode Suppression of Thickness Shear Bulk Acoustic Resonators on Lithium Niobate Using Standard and Broadband Piston Mode Designs

Partially Etched Piezoelectric Film Filled with SiO2 Structure Applied to A1 Mode Resonators for Transverse Modes Suppression

LITHIUM NIOBATE THIN FILM BASED A1 MODE RESONATORS WITH FREQUENCY UP TO 16 GHZ AND ELECTROMECHANICAL COUPLING FACTOR NEAR 35%

Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Design and Fabrication of Lithium Niobate Asymmetrical Mode Resonators toward C-band and Ku-band

High Figure-of-Merit A1-Mode Lamb Wave Resonators Operating Around 6 GHz Based on the LiNbO3 Thin Film

Design and Analysis of Lithium-Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes.

Application of Phononic Crystal Structure for Side Leakage Suppression in A1-Mode Lamb Wave Resonators

The Influence of the Piston Length on the Performance of I.H.P. SAW Resonator

High-Performance SAWR Strain Sensor With Piston-Mode Operation

Wideband Double-Mode Bulk Acoustic Wave Resonator Filters on Lithium Niobate Using Periodically Slotted Electrodes

Waveguide-resonator Coupling Structure Design in the Lithium Niobate on Insulator for Χ （2） Nonlinear Applications

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Through-Holes Design for Ideal LiNbO3 A1 Resonators