Abstract:Laterally excited bulk acoustic resonators (XBARs) are plate mode resonators in which one of the higher-order plate modes transforms into the bulk acoustic wave (BAW) due to the very thin plates used in these devices. The propagation of the primary mode is usually accompanied by numerous spurious modes, which deteriorate resonator performances and restrict potential XBARs' applications. This article suggests a combination of different methods for insight into the nature of the spurious modes and their suppression. Analysis of the BAW slowness surface provides optimization of XBARs for single-mode performance in the filter passband and around it. The rigorous simulation of admittance functions in the optimal structures allows for further optimization of electrode thickness and duty factor. Finally, the nature of different plate modes generated in a wide frequency range is clarified via simulation of dispersion curves, which characterize acoustic mode propagation in a thin plate under the periodic metal grating, and visualization of displacements accompanying wave propagation. Application of this analysis to lithium niobate (LN)-based XBARs demonstrated that in LN cuts with Euler angles (0°, 4°-15°, 90°) and plate thickness dependent on orientation and varying between 0.05 and 0.1 wavelengths, the spurious-free response could be achieved. Due to tangential velocities of 18-37 km/s combined with the coupling of 15%-17% and feasible duty factor a/p = 0.5, the found XBAR structures can be applied in high-performance 3-6 GHz filters.

Transverse Mode Suppression of Thickness Shear Bulk Acoustic Resonators on Lithium Niobate Using Standard and Broadband Piston Mode Designs

Application of Free Side Edges to Thickness Shear Bulk Acoustic Resonator on Lithium Niobate for Suppression of Transverse Resonances

Transverse energy confinement and resonance suppression in SAW resonators using low-cut lithium tantalate

Full 3D FEM Simulation of Thickness Shear Bulk Acoustic Resonators on LN Assisted by Hierarchical Cascading Technique

Transverse Mode Suppression for S0-Like SAW Mode Resonator

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

Use of periodic trenches in SMR-type XBAR for suppression of transverse mode resonances and lateral leakage

Broadband Piston Mode Operation of Solidly Mounted Resonator Employing A1 Lamb Mode on Lithium Niobate

Impact of Partial Thinning of SiO<inf>2</inf> on Spurious Modes in TC-SAW Resonators

Design and Fabrication of Lithium Niobate Asymmetrical Mode Resonators toward C-band and Ku-band

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Investigation of Spurious Mode Suppression in 3.8 GHz Shear-Horizontal Mode Surface Acoustic Wave Resonators Based on LiNbO3/SiO2/Si Multilayer Structure

Spurious Modes in Laterally Excited Bulk Acoustic Resonators (XBARs): Analysis and Suppression

Wideband Double-Mode Bulk Acoustic Wave Resonator Filters on Lithium Niobate Using Periodically Slotted Electrodes

Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2

Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate

Comparative Study of Piston Mode Designs for Temperature-Compensated Surface Acoustic Wave Resonators Using SiO2/LiNbO3 Structure

Transverse Modes in Temperature Compensated Surface Acoustic Wave Devices

Suppressed Transverse Mode Generation in TF-SAW Resonators Based on LiTaO3/Sapphire

Suppression of Transverse Mode Responses in Ultra-Wideband SAW Resonators Fabricated on a Cu-Grating/15°YX-LiNbO 3 Structure

Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film