Abstract:With the arrival of the Fifth Generation (5G) communication era, there has been an urgent demand for acoustic filters with a high frequency and ultrawide bandwidth used in radio-frequency (RF) front-ends filtering and signal processing. First-order antisymmetric (A1) lamb mode resonators based on LiNbO3 film have attracted wide attention due to their scalable, high operating frequency and large electromechanical coupling coefficients (K2), making them promising candidates for sub-6 GHz wideband filters. However, A1 mode resonators suffer from the occurrence of transverse modes, which should be addressed to make these devices suitable for applications. In this work, theoretical analysis is performed by finite element method (FEM), and the admittance characteristics of an A1 mode resonator and displacement of transverse modes near the resonant frequency (fr) are investigated. We propose a novel Dielectric-Embedded Piston Mode (DEPM) structure, achieved by partially etching a piezoelectric film filled with SiO2, which can almost suppress the transverse modes between the resonant frequency (fr) and anti-resonant frequency (fa) when applied on ZY-cut LiNbO3-based A1 mode resonators. This indicates that compared with Broadband Piston Mode (BPM), Filled-broadband Piston Mode (FPM) and standard structures, the DEPM structure is superior. Furthermore, the design parameters of the resonator are optimized by adjusting the width, depth and filled materials in the etched window of the DEPM structure to obtain a better suppression of transverse modes. The optimized A1 mode resonator using a DEPM structure exhibits a transverse-free response with a high fr of 3.22 GHz and a large K2 of ~30%, which promotes the application of A1 mode devices for use in 5G RF front-ends.

Broadband Piston Mode Operation of Solidly Mounted Resonator Employing A1 Lamb Mode on Lithium Niobate

Comparative Study of Traditional and Broadband Piston Mode Designs of A1-Mode Resonators on Lithium Niobate

Broadband Piston Mode Operation for First-order Antisymmetric Mode Resonators

Transverse Mode Suppression of Thickness Shear Bulk Acoustic Resonators on Lithium Niobate Using Standard and Broadband Piston Mode Designs

Use of periodic trenches in SMR-type XBAR for suppression of transverse mode resonances and lateral leakage

Revisiting Piston Mode Design for Radio Frequency Surface Acoustic Wave Resonators

Partially Etched Piezoelectric Film Filled with SiO2 Structure Applied to A1 Mode Resonators for Transverse Modes Suppression

Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Application of Phononic Crystal Structure for Side Leakage Suppression in A1-Mode Lamb Wave Resonators

Use of Heavy Dielectric Materials in Solidly Mounted A1 Mode Resonators Based on Lithium Niobate

Transverse Mode Suppression for S0-Like SAW Mode Resonator

Wideband Double-Mode Bulk Acoustic Wave Resonator Filters on Lithium Niobate Using Periodically Slotted Electrodes

Impact of Coupling Between Multiple SAW Modes on Piston Mode Operation of SAW Resonators.

K-band LiNbO3 A3 Lamb-wave Resonators with Sub-wavelength Through-holes

Lateral Field Excitation of Thickness Longitudinal Mode and Shear Mode with ZnO Based on Solidly Mounted Resonator

High Figure-of-Merit A1-Mode Lamb Wave Resonators Operating Around 6 GHz Based on the LiNbO3 Thin Film

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Impact of Partial Thinning of SiO<inf>2</inf> on Spurious Modes in TC-SAW Resonators

Comparative Study of Piston Mode Designs for Temperature-Compensated Surface Acoustic Wave Resonators Using SiO2/LiNbO3 Structure

A Modified PiBVD Model for LAMB Wave Resonator

Analysis and Suppression of Spurious In-Plane Lamé-Like Modes in Lamb Wave Resonators