Abstract:A SiO2/Al/LiNbO3 structure has a large electromechanical coupling factor (K2) and good temperature coefficient of frequency (TCF) for the UMTS Band I application. However, the SiO2/Al/LiNbO3 structure also supports two unwanted spurious responses; one is caused by the Rayleigh mode and the other by the transverse-mode. As the authors have previously discussed, the Rayleigh-mode spurious response can be suppressed by controlling the cross-sectional shape of a SiO2 overlay deposited on resonator electrodes. On the other hand, the transverse-mode spurious responses are commonly suppressed by IDT (Interdigital Transducer) apodization, and the length weighting for dummy electrodes selectively could scatter higher order transverse-mode spurious responses. In this paper, the spurious responses of the SAW resonator on a SiO2/Al/LiNbO3 structure are analyzed by the laser probe system. And, a new technique to suppress the transverse-mode spurious responses is proposed. In the technique, the SiO2 overlay is selectively removed from the dummy electrode region. The transverse-mode spurious behavior was dependent on the velocities (vi and vd) in the IDT and the dummy regions. When vi <; vd, the higher-order transverse-mode spurious response could be suppressed. Furthermore, the SAW energy confinement could be enhanced in the IDT electrode region by selectively SiO2 removing. The transverse-mode spurious responses were successfully suppressed without degrading the SAW resonator performances.

Impact of Partial Thinning of SiO<inf>2</inf> on Spurious Modes in TC-SAW Resonators

Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2

Transverse Mode Suppression for S0-Like SAW Mode Resonator

Transverse Modes in Temperature Compensated Surface Acoustic Wave Devices

Investigation on spurious mode suppression in 3.8-GHz SH-mode SAW resonators based on LiNbO 3 /SiO 2 /Si multilayer structure

Investigation of Spurious Mode Suppression in 3.8 GHz Shear-Horizontal Mode Surface Acoustic Wave Resonators Based on LiNbO3/SiO2/Si Multilayer Structure

Suppression Of Transverse-Mode Spurious Responses For Zero Temperature Coefficient Of Frequency Saw Resonator On A Sio2/Al/Linbo3 Structure

Suppression of Transverse-Mode Spurious Responses for Saw Resonators on Sio2/Al/Linbo3 Structure by Selective Removal of Sio2

Transverse Mode Suppression of Thickness Shear Bulk Acoustic Resonators on Lithium Niobate Using Standard and Broadband Piston Mode Designs

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Suppression of Transverse-Mode Spurious Responses by Selectively SiO2 Removing Technique for SAW Resonators on a SiO2/Al/LiNbO3 Structure

Theoretical Considerations on Suppression Mechanism of Spurious Transverse Mode Resonances in Wideband SAW Resonators on LiNbO3

Transverse-Mode Spurious Suppression Technique for Surface Acoustic Wave Resonator with Zero Temperature Coefficient of Frequency on a SiO2/Al/LiNbO3 Structure

Transverse Mode Suppression for Low Velocity SAW Resonator on Al/Pt/Low-cut LT/Quartz Structure

S0-like SAW mode resonator on LiNbO3/SiO2/SiC structure

Comparative Study of Piston Mode Designs for Temperature-Compensated Surface Acoustic Wave Resonators Using SiO2/LiNbO3 Structure

Suppressed Transverse Mode Generation in TF-SAW Resonators Based on LiTaO3/Sapphire

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO3/SiO2/Si Substrate

SAW velocity reduction and spurious modes suppression on the layer structure

Impact of Coupling Between Multiple SAW Modes on Piston Mode Operation of SAW Resonators.

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO<inf>3</inf>/SiO<inf>2</inf>/Si Substrate