Abstract:In this paper, a new structure of high precision frame-type optomechanical gyroscope is proposed. Based on the basic theory of photonic crystal cavity optomechanical system, the working mechanism of the new high precision micro gyroscope is analyzed. Through the simulation optimization and numerical calculation of the mechanical structure and optical structure of the gyroscope, the theoretical measurement sensitivity of angular velocity is 261.9mV/(°/s), and the rate noise density is 0.011(°/s)/Hz 1/2 . Based on the micro-nano fabrication process, the sample of the cavity optomechanical gyroscope chip was fabricated on SOI, and the preliminary test of the gyroscope chip was carried out on the vacuum test platform. With the same magnitude of inertia mass, the precision of this new micro gyroscope is obviously better than that of the traditional microelectromechanical system (MEMS) gyroscope, which provides a new path for realizing a high-precision, easy-to-integrate-on-chip, and strongly anti-electromagnetic interference gyroscope, and has great potential application value in high precision inertial navigation, micro vibration detection and other technical fields.

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