Scribing of Sapphire by Dry-Etching-asisted Femtosecond Laser Fabrication

Xue-Qing Liu,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.1360/tb-2020-1224

2021-01-01

Chinese Science Bulletin (Chinese Version)

Abstract:There is no abstract available for this article. etching Sapphire compound eye femtosecond laser Bionic compound eye sapphire Etching Femtosecond laser × Update Abstract English Chinese Update

What problem does this paper attempt to address?

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Xue-Qing Liu,Yong-Lai Zhang,Qian-Kun Li,Jia-Xin Zheng,Yi-Ming Lu,Saulius Juodkazis,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.1186/s43074-022-00047-3

IF: 16.5

2022-01-21

PhotoniX

Abstract:Abstract Femtosecond laser machining of biomimetic micro/nanostructures with high aspect ratio (larger than 10) on ultrahard materials, such as sapphire, is a challenging task, because the uncontrollable surface damage usually results in poor surface structures, especially for deep scribing. Here, we report an inside-out femtosecond laser deep scribing technology in combination with etching process for fabricating bio-inspired micro/nanostructures with high-aspect-ratio on sapphire. To effectively avoid the uncontrollable damage at the solid/air interface, a sacrificial layer of silicon oxide was employed for surface protection. High-quality microstructures with an aspect ratio as high as 80:1 have been fabricated on sapphire surface. As a proof-of-concept application, we produced a moth-eye inspired antireflective window with sub-wavelength pyramid arrays on sapphire surface, by which broadband (3–5 μm) and high transmittance (98% at 4 μm, the best results reported so far) have been achieved. The sacrificial layer assisted inside-out femtosecond laser deep scribing technology is effective and universal, holding great promise for producing micro/nanostructured optical devices.

optics
Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

Gao Si,Wang Zi-Han,Hua Jian-Guan,Li Qian-Kun,Li Ai-Wu,Yu Yan-Hao,

DOI: https://doi.org/10.7498/aps.66.147901

IF: 0.906

2017-01-01

Acta Physica Sinica

Abstract:Sapphire has shown broad application prospects in military and medical fields, due to its high hardness, excellent corrosion resistance and high transmission in the infrared band. However, these characteristics have also brought about lots of difficulties in machining or chemical etching the material. Femtosecond laser processing with excellent characteristics including small heat-affected zones and high processing resolution ratio, has become an emerging field. Therefore, it has important application prospects and has found increasingly wide applications in the fields of material modification and high-quality fabrication of three-dimensional micro-nano structures and devices. In this paper, we propose a method in which femtosecond laser processing based on multi-photon absorption is used to process sapphire beyond the optical diffraction limit. In this work, femtosecond laser with a central wavelength of 343 nm is focused on the sapphire and the surface of sapphire is scanned with the high-precision piezoelectric positioning stages. Nano structures each with a width of about 61 nm are obtained, and the minimum space between the nano structures could be as short as about 142 nm. Further, the influences on the processing resolution from laser power and scanning speed are investigated and the generation mechanism for the nano-ripple structure is discussed. Finally, femtosecond laser processing on the sapphire with a resolution beyond the optical diffraction limit is achieved. This work provides a reference for processing the hard and brittle materials by femtosecond laser.

physics, multidisciplinary
A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Kaixuan Wang,Jun Chen,Yubin Zhang,Qingzhi Li,Feng Tang,Xin Ye,Wanguo Zheng

DOI: https://doi.org/10.3390/coatings14040481

IF: 3.236

2024-04-15

Coatings

Abstract:Femtosecond laser processing technology is an advanced sub-micro-processing technique that enables the non-contact processing of various materials. This technology can be used to apply sub-micro structures for purposes such as hydrophilicity enhancement, optical transmittance improvement, and photonics detection. However, when it comes to processing micro/nanostructures on highly brittle materials using femtosecond lasers, there are challenges such as low processing efficiency, generation of debris, and microcracking. In this paper, we propose a method called the out-of-focus femtosecond laser direct writing technique combined with wet etching. This method offers simplicity, speed, and flexibility in preparing dense, large-area sub-microstructured surfaces on the brittle material sapphire. Our detailed investigation focuses on the impact of laser processing parameters (direct writing period, distance of focusing, direct writing speed, etc.) on the sub-microstructures of Al2O3 surfaces. The results demonstrate that this method successfully creates embedded sub-microstructures on the sapphire surface. The microholes, with a diameter of approximately 2.0 μm, contain sub-micro structures with a minimum width of 250 ± 20 nm. Additionally, we conducted experiments to assess the optical transmittance of sapphire nanostructures in the range of 350–1200 nm, which exhibited an average transmittance of approximately 77.0%. The water contact angle (CA) test yielded a result of 52 ± 2°, indicating an enhancement in the hydrophilicity of the sapphire nanostructures with only a slight reduction in optical transmittance. Our efficient fabrication of sub-microstructures on the sapphire surface of highly brittle materials offers a promising method for the production and application of brittle materials in the field of micro-optics.

materials science, multidisciplinary,physics, applied, coatings & films
Fabrication of an Anti-Reflective Microstructure on Sapphire by Femtosecond Laser Direct Writing.

Qian-Kun Li,Jia-Ji Cao,Yan-Hao Yu,Lei Wang,Yun-Lu Sun,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.1364/ol.42.000543

IF: 3.6

2017-01-01

Optics Letters

Abstract:Herein, we report a facile approach for the maskless production of subwavelength-structured antireflective surfaces on sapphire with high and broadband transmittance in the mid-IR: femtosecond laser direct writing assist with wet etching. With this method, inverted pyramid and cone arrays with a pitch of about 2 μm and a total height of near 900 nm on the sapphire were produced. The resulting subwavelength structures greatly suppress specular reflection at normal incidence. The transmission measurements between 3 and 5 μm are in agreement with the simulations performed using VirtualLab, and the transmittance reached a maximum value of 92.5% at 4 μm. The sapphire with subwavelength structures also exhibits angle-independent transmittance characteristics up to a high θ=60°. Therefore, these subwavelength structures on sapphire are of great technological importance in mid-IR optics, especially for the harsh-condition-applicable windows of military mid-IR devices.
Sapphire Selective Laser Etching Dependence on Radiation Wavelength and Etchant

Agnė Butkutė,Romualdas Sirutkaitis,Darius Gailevičius,Domas Paipulas,Valdas Sirutkaitis

DOI: https://doi.org/10.3390/mi14010007

2022-12-20

Abstract:Transparent and high-hardness materials have become the object of wide interest due to their optical and mechanical properties; most notably, concerning technical glasses and crystals. A notable example is sapphire-one of the most rigid materials having impressive mechanical stability, high melting point and a wide transparency window reaching into the UV range, together with impressive laser-induced damage thresholds. Nonetheless, using this material for 3D micro-fabrication is not straightforward due to its brittle nature. On the microscale, selective laser etching (SLE) technology is an appropriate approach for such media. Therefore, we present our research on C-cut crystalline sapphire microprocessing by using femtosecond radiation-induced SLE. Here, we demonstrate a comparison between different wavelength radiation (1030 nm, 515 nm, 343 nm) usage for material modification and various etchants (hydrofluoric acid, sodium hydroxide, potassium hydroxide and sulphuric and phosphoric acid mixture) comparison. Due to the inability to etch crystalline sapphire, regular SLE etchants, such as hydrofluoric acid or potassium hydroxide, have limited adoption in sapphire selective laser etching. Meanwhile, a 78% sulphuric and 22% phosphoric acid mixture at 270 °C temperature is a good alternative for this process. We present the changes in the material after the separate processing steps. After comparing different processing protocols, the perspective is demonstrated for sapphire structure formation.
FEMTOSECOND LASER SCRIBING OF SAPPHIRE AT WAVELENGTH 1040 AND 520 NM

B. A. Shulenkova,E. V. Lutsenko,A. V. Danilchik,Ja. A. Solovjov,A. N. Pyatlitski,M. V. Kirasirava

DOI: https://doi.org/10.35596/1729-7648-2019-125-7-152-156

2019-12-07

Doklady BGUIR

Abstract:Sapphire cutting is one of the largest markets in laser materials processing. Since sapphire is one of the hardest transparent materials its mechanical and optical properties made it the ideal choice for use in the production of various devices, such as LEDs and transistors, cover glasses of watches and mobile devices. Among existing laser- or diamond-based tools solutions, femtosecond laser scribing appear as a promising technology since this technology has the unique capacity to produce highly localized bulk modification owing to non-linear absorption. Sapphire cutting with solid-state lasers is well known for many years and has become a modern industrial process. However, achievable process speed and cut quality are still limited. The femtosecond laser scribing of sapphire was studied at wavelengths of 1040 and 520 nm, followed by wet etching in HNO3/HF solution to identify emerging defects. The morphology of the laser ablated sapphire surface was evaluated by scanning electron microscopy. It was shown that at the wavelength of 1040nm, the material was effectively removed from the surface; however, cracks on the surface were formed. The use of the second harmonic gave more accurate and deep cuts compared with the main frequency at the same conditions. At the wavelength of 520 nm, the cracks were formed anisotropically inside the volume of the material. Therefore, there is a potential application of the femtosecond laser scribing for the fabrication of sapphire-based devices.
Rapid Engraving Of Artificial Compound Eyes From Curved Sapphire Substrate

Xue-Qing Liu,Shuang-Ning Yang,Lei Yu,Qi-Dai Chen,Yong-Lai Zhang,Hong-Bo Sun

DOI: https://doi.org/10.1002/adfm.201900037

IF: 19

2019-01-01

Advanced Functional Materials

Abstract:With high thermal and mechanical stability, glass artificial compound eyes have great potential applications in wide field-of-view (FOV) imaging and fast detection. However, the rapid fabrication of large-area, high integration, uniform, and well-designed three-dimensional (3D) glass compound eyes is still a great challenge. Here, a dry-etching-assisted femtosecond laser machining (DE-FsLM) technology is proposed for fabrication of cm-sized concave compound eye from a curved sapphire substrate, with which the fabrication efficiency can be improved by over two orders of magnitude compared with direct laser ablation. With high hardness and thermal stabilities, the sapphire concave compound eyes can be used as high-temperature and hard-casting templates for the replication of convex compound eyes on K9 glass. The replicated cm(2)-size all-glass compound eye consists of a spherical macrolens (1 cm diameter and 2.3 mm height) and over 190 000 close-packed ommatidia (approximate to 20 mu m diameter and 1.5 mu m height). The compound eyes exhibit excellent optical properties with wide FOV (up to 90 degrees) imaging and focusing. These results indicate that the DE-FsLM and casting replication technology will open new opportunities in micro-/nanofabrication of hard materials.
Femtosecond Laser Engraving of Deep Patterns in Steel and Sapphire

David Pallarés-Aldeiturriaga,Pierre Claudel,Julien Granier,Julien Travers,Lionel Guillermin,Marc-Olivier Flaissier,Patrick Beaure d’Augeres,Xxx Sedao

DOI: https://doi.org/10.3390/mi12070804

IF: 3.4

2021-07-07

Micromachines

Abstract:Femtosecond laser engraving offers appealing advantages compared to regular laser engraving such as higher precision and versatility. In particular, the inscription of deep patterns exhibits an increasing interest in industry. In this work, an optimization protocol based on constraining overlap ratio and scan number is demonstrated. The proposed method allows changing overlap ratio while maintaining depth in the same range, which reduces the sampling number. This study WAS applied to stainless steel 316 L and sapphire for engravings deeper than 100 μm. Results exhibit overall depths higher than threshold values and allowed to determine optimized engraving quality, for instance, roughness in steel can be reduced while maintaining depth and taper angle by reducing overlap ratio. The optimized laser parameters such as roughness and taper angle factors for sapphire were also found to be as follows: 200 kHz, 86% overlap and 12 J/cm2. As a demonstration, a logo engraving is illustrated at the end.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Qian-Kun Li,Yan-Hao Yu,Lei Wang,Xiao-Wen Cao,Xue-Qing Liu,Yun-Lu Sun,Qi-Dai Chen,Ji-An Duan,Hong-Bo Sun

DOI: https://doi.org/10.1109/lpt.2016.2538270

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:Here, we report a sapphire-based Fresnel zone plate (FZP), which is fabricated by femtosecond laser direct writing assisted with subsequent wet etching. With this method, we solved the problem of high surface roughness caused by ultrafast femtosecond laser processing. We have obtained similar to 12-nm average surface roughness smaller than 1/25 of the optical working wavelength. As-formed sapphire FZP also exhibited a well-defined geometry. More importantly, ultraviolet (UV) light focusing and imaging can be easily achieved. Due to the high material hardness, thermal and chemical stabilities of sapphire, such sapphire FZP, may have great potential in UV imaging and focusing under some harsh environments.
Wear-Resistant Blazed Gratings Fabricated by Etching-Assisted Femtosecond Laser Lithography

Xue-Qing Liu,Rong Cheng,Jia-Xin Zheng,Shuang-Ning Yang,Bao-Xu Wang,BenFeng Bai,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.1109/jlt.2021.3066976

IF: 4.7

2021-01-01

Journal of Lightwave Technology

Abstract:Blazed gratings are widely used in optical detection devices with the unique property of concentration of light energy to a desired diffraction order. However, traditional substrates for fabricating blazed gratings are easily damaged with the wear and tear in long-term usage under harsh conditions. Here, we propose the fabrication of blazed gratings on sapphire with high mechanical stability by femtosecond laser lithography combined with subsequent reactive ion etching (RIE). Various sapphire blazed gratings with periods from 2 mu m to 10 mu m and heights from 260 nm to 2 mu m were realized to concentrate light energy (wavelengths of 405 nm, 532 nm and 633 nm) to different diffraction orders (1st, 2nd, and 3rd). The results provide great insights for the construction of micro-optical devices that have potential applications under harsh conditions.
Ultrafast Laser-Inscribed Nanogratings in Sapphire for Geometric Phase Elements.

Shuai Xu,Hua Fan,Zhen-Ze Li,Jian-Guan Hua,Yan-Hao Yu,Lei Wang,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.1364/ol.413177

IF: 3.6

2020-01-01

Optics Letters

Abstract:We systematically studied femtosecond laser-inscribed self-organized nanogratings and geometric phase elements such as a polarization diffraction focusing lens and Q-plate in sapphire crystal. Besides the void structures observed in the focus, nanogratings with periods of 150~300 nm were observed, depending on a nanoslit that took the role of a seeding effect by localized light field enhancement. The non-polarized refractive index change and birefringence were measured with values around 1 ∼ 2 × 10 − 3 and 6 × 10 − 4 , respectively. Based on the laser-inscribed form birefringence, a geometric phase lens and Q-plate were successfully demonstrated in sapphire with high imaging and a focusing effect. We expect that our findings may promote the understanding of laser-induced nanogratings in bulk and potential applications in geometric phase elements.
Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces

Stefan Kefer,Julian Zettl,Cemal Esen,Ralf Hellmann

DOI: https://doi.org/10.3390/ma15186233

2022-09-08

Abstract:Sapphire is a robust and wear-resistant material. However, efficient and high-quality micromachining is still a challenge. This contribution demonstrates and discusses two novels, previously unreported approaches for femtosecond laser-based micromachining of rotational-symmetric sapphire workpieces, whereas both methods are in principal hybrids of laser scanning and laser turning or laser lathe. The first process, a combination of a sequential linear hatch pattern in parallel to the workpiece's main axis with a defined incremental workpiece rotation, enables the fabrication of sapphire fibers with diameters of 50 μm over a length of 4.5 mm. Furthermore, sapphire specimens with a diameter of 25 μm over a length of 2 mm can be fabricated whereas an arithmetical mean height, i.e., Sa parameter, of 281 nm is achieved. The second process combines a constant workpiece feed and orthogonal scanning with incremental workpiece rotation. With this approach, workpiece length limitations of the first process are overcome and sapphire fibers with an average diameter of 90 µm over a length of 20 cm are manufactured. Again, the sapphire specimen exhibits a comparable surface roughness with an average Sa value of 249 nm over 20 cm. Based on the obtained results, the proposed manufacturing method paves an innovative and flexible, all laser-based way towards the fabrication or microstructuring of sapphire optical devices, and thus, a promising alternative to chemical processes.
Research on sapphire micro-blind-hole machining based on femtosecond laser

Xuyang Fang,Jian Dou,Xiangyang Dong,Wenqiang Duan

DOI: https://doi.org/10.1080/00150193.2020.1760607

2020-07-23

Ferroelectrics

Abstract:The experiment of micro-blind-hole processing of sapphire by a femtosecond pulsed laser with a wavelength of 1030 nm, repetition frequency of 100 kHz and pulse width of 290 fs was carried out to study the effects of laser power, scanning speed, repeated scanning times and defocusing amount on the morphology of micro-blind holes. It can be seen from the experimental results that the depth of the micro-blind-hole increases as the laser power increases, the scanning speed decreases, and the repeated scanning times increase. When the defocusing amount is positive, the depth of micro-blind-hole decreases with the increase of defocusing amount. The depth is constant due to the filament effect during negative defocusing amount. The size of the micro-blind hole is mainly decided by the path of the circumferential cutting process. It is indicated that fine micromachining of sapphire materials can be achieved by controlling femtosecond laser parameters and processing parameters.

materials science, multidisciplinary,physics, condensed matter
Fabrication of Optical Elements with Femtosecond Doubled-Frequency Ti:sapphire Laser

XH Sun,CH Zhou,P Xi,EW Dai,LR Liu,BK Yu

DOI: https://doi.org/10.1117/12.504016

2003-01-01

Abstract:In fabrication of a fine optical element, femtosecond laser is an attractive experimental tool because it avoids the splutter effect to damage the nearby lines. However, the wavelength of the usual Ti:sapphire laser is insensitive to the widely-used photoresist in microlithographic industry. In this paper, we introduce a new method with femtosecond doubled-frequency laser by use of a BBO crystal to fabricate optical gratings and chromium photomasks. The laser source is the Ti:sapphire laser with a central wavelength of 790 nm and its doubled-frequency laser is obtained through the BBO crystal whose wavelength (395nm) is within the sensitive exposure range of the photoresist. This enables us to fabricate fine optical elements with the normal photolithographic technique. In the experiment, we use a translator that is controlled by a computer to accurately move for fabrication of optical elements with high precision. In contrast to the other techniques, our approach has the higher quality and precision, for femtosecond laser works faster than the material’s thermal diffusion, i.e., without splutter effect that yields the clear edge of the optical element. Moreover, it also makes the fabrication processing simplified. Experiments are given to verify that this method should be highly interesting for the fabrication of fine binary optical elements.
A new surface-polishing and defect-revealing etchant for sapphire

Zhang Qiang,Deng Peizhen,Gan Fuxi

DOI: https://doi.org/10.1016/0167-577X(90)90138-C

IF: 3

1990-01-01

Materials Letters

Abstract:A new optimum surface-polishing and defect-revealing etchant for sapphire single crystals is described. Etching is accomplished by immersing wafers in molten borax at a temperature above 800°C. Dislocations and twin lamellae in the wafers have been revealed by the etching method and X-ray transmission topography with comparable results.
Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation

Quanli ZHANG,Zhen ZHANG,Qiwen WANG,Yucan FU,Jiuhua XU

DOI: https://doi.org/10.1016/j.cja.2021.10.009

IF: 5.7

2022-03-01

Chinese Journal of Aeronautics

Abstract:Fabrication of the surface micro-texture on the C-plane sapphire is undertaken by a 355 nm Ultraviolet (UV) pulsed laser. The surface micro-textures of sapphire with different laser scanning line spacing ranging from 10 μm to 100 μm are obtained, where the selection range of scanning line spacing is controlled in the range of the groove width and plasma width to obtain a surface of high Peak-Valley (PV) value. A reasonable processing order is proposed to manufacture different types of surface micro-textures on sapphire by laser ablation trajectory regulation. In the multiple-passes laser ablation of sapphire by the UV nanosecond pulsed laser, the scanning lines in each direction is treated as once scanning. On this basis, the multiple processing can be carried out to avoid the influence of the subsequent scanning on the machined groove. In addition, the effect of different scanning line spacing on the PV value is quantified and different types of surface micro-textures on sapphire, including the squares, the rhombuses and the hexagons, are successfully fabricated, which can be applied in the friction reduction or anti-reflection field.

engineering, aerospace
Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser

MaoLu WANG,LiJun YANG,Wei MEI,Yang WANG

DOI: https://doi.org/10.1360/sspma2018-00420

2019-09-18

Abstract:Sapphire as a typical wide bandgap semiconductor material, has good physical and chemical properties and is widely used in mechanical electronics, aerospace, microelectronics and other fields. In order to improve ablation efficiency and at the same time ensure the processing quality, the ns-fs dual beam laser ablation method is proposed to process sapphire, which utilizes the high peak power of femtosecond pulses to excite free electrons through multiphoton ionization and collision ionization and the relatively larger fluence of nanosecond laser to improve the processing efficiency. In order to reveal the energy coupling mechanism between ns-fs dual beam laser and sapphire material, Fokker-Plank equation, Drude model and two-temperature model were used to study the evolution process of free electrons induced by femtosecond laser and the interaction between free electrons and incident laser. The energy coupling process and ablation process were simulated by finite element method, and the space-time evolution law of electron densities and its influence on surface optical properties such as absorption coefficient and reflectivity under different pulse delays were studied to reveal the mechanism of high-efficiency and high-quality processing of sapphire by ns-fs dual beam laser. This research is of great significance to the high-efficiency and high-quality processing of brittle and hard materials.

astronomy & astrophysics,physics, multidisciplinary
Material removal and surface formation mechanism of C-plane sapphire in multipass ablation by a nanosecond UV laser

Qiwen Wang,Quanli Zhang,Zhen Zhang,Wentao Wang,Jiuhua Xu

DOI: https://doi.org/10.1016/j.ceramint.2020.05.244

IF: 5.532

2020-09-01

Ceramics International

Abstract:The material removal and the surface formation mechanism of C-plane sapphire in multipass ablation using a nanosecond laser were investigated. The surface morphology and the width and depth of the grooves under different laser-processing parameters were characterised and investigated based on an analysis of the laser energy fluence distribution in time and space, which determines the obtained depth and width of the groove. The results show that the material removal mechanism in the sapphire processed using a nanosecond UV laser was a mixture of thermal and photochemical effects. The laser thermal effect caused sublimation, vaporisation, melt, and sputtering by plasma and was characterised by the resolidified bulk area and the deposition of fine particles. Surface cracking in a certain direction to the laser scanning path was also observed because of the gradient-temperature-induced thermal stress. In addition, the photochemical effect was revealed by the obtained X-ray photon spectra, in which the appearance of a metal Al peak and a decreasing O1s peak after laser ablation indicated the photolysis of Al2O3.

materials science, ceramics
Laser-Inscribed Stress-Induced Birefringence of Sapphire.

Hua Fan,Meguya Ryu,Reo Honda,Junko Morikawa,Zhen-Ze Li,Lei Wang,Jovan Maksimovic,Saulius Juodkazis,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.3390/nano9101414

IF: 5.3

2019-01-01

Nanomaterials

Abstract:Birefringence of 3 x 10(-3) is demonstrated inside cross-sectional regions of 100 mu m, inscribed by axially stretched Bessel-beam-like fs-laser pulses along the c-axis inside sapphire. A high birefringence and retardance of lambda/4 at mid-visible spectral range (green) can be achieved using stretched beams with axial extension of 30-40 mu m. Chosen conditions of laser-writing ensure that there are no formations of self-organized nano-gratings. This method can be adopted for creation of polarization optical elements and fabrication of spatially varying birefringent patterns for optical vortex generation.
Three-dimensional femtosecond laser nanolithography of crystals

Airán Ródenas,Min Gu,Giacomo Corrielli,Petra Paiè,Sajeev John,Ajoy K. Kar,Roberto Osellame

DOI: https://doi.org/10.1038/s41566-018-0327-9

IF: 35

2018-12-31

Nature Photonics

Abstract:So far, nanostructuring of hard optical crystals has been exclusively limited to their surface, as stress-induced crack formation and propagation render high-precision volume processes ineffective<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 1" title="Gamaly, E. G. et al. Laser–matter interaction in the bulk of a transparent solid: confined microexplosion and void formation. Phys. Rev. B 73, 214101 (2006)." href="/articles/s41566-018-0327-9#ref-CR1" id="ref-link-section-d351e438">1</a>,<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 2" title="Juodkazis, S., Mizeikis, V. & Misawa, H. Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications. J. Appl. Phys. 106, 051101 (2009)." href="/articles/s41566-018-0327-9#ref-CR2" id="ref-link-section-d351e441">2</a>. Here, we show that the rate of nanopore chemical etching in the popular laser crystals yttrium aluminium garnet and sapphire can be enhanced by more than five orders of magnitude (from <0.6 nm h−1 to ~100 µm h−1) by the use of direct laser writing, before etching. The process makes it possible to produce arbitrary three-dimensional nanostructures with 100 nm feature sizes inside centimetre-scale laser crystals without brittle fracture. To showcase the potential of the technique we fabricate subwavelength diffraction gratings and nanostructured optical waveguides in yttrium aluminium garnet and millimetre-long nanopores in sapphire. The approach offers a pathway for transferring concepts from nanophotonics to the fields of solid-state lasers and crystal optics.

optics,physics, applied

Scribing of Sapphire by Dry-Etching-asisted Femtosecond Laser Fabrication

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Fabrication of an Anti-Reflective Microstructure on Sapphire by Femtosecond Laser Direct Writing.

Sapphire Selective Laser Etching Dependence on Radiation Wavelength and Etchant

FEMTOSECOND LASER SCRIBING OF SAPPHIRE AT WAVELENGTH 1040 AND 520 NM

Rapid Engraving Of Artificial Compound Eyes From Curved Sapphire Substrate

Femtosecond Laser Engraving of Deep Patterns in Steel and Sapphire

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Wear-Resistant Blazed Gratings Fabricated by Etching-Assisted Femtosecond Laser Lithography

Ultrafast Laser-Inscribed Nanogratings in Sapphire for Geometric Phase Elements.

Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces

Research on sapphire micro-blind-hole machining based on femtosecond laser

Fabrication of Optical Elements with Femtosecond Doubled-Frequency Ti:sapphire Laser

A new surface-polishing and defect-revealing etchant for sapphire

Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation

Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser

Material removal and surface formation mechanism of C-plane sapphire in multipass ablation by a nanosecond UV laser

Laser-Inscribed Stress-Induced Birefringence of Sapphire.

Three-dimensional femtosecond laser nanolithography of crystals