An In-Fiber Acceleration Sensor Based on Fabry–Perot Cavity

Yulian Wang,Liyue Jiang,Wei Liu,Zhigang Cao,Shenglai Zhen,Feng Xu

DOI: https://doi.org/10.1109/icocn.2019.8934939

2019-01-01

Abstract:A compact fiber-optic acceleration sensor based on Fabry-Perot interferometer is proposed and fabricated. The experimental results show that the minimum detectable acceleration of the accelerometer is 0.928 mg and the available bandwidth is 10-90 Hz.

What problem does this paper attempt to address?

Monolithic Integrated Cavity Optomechanical Accelerometer Based on Push-Pull Photonic Crystal Zipper Cavity

Hongshuo Liu,Xuan She,Heliang Shen,Liying Chen,Ran Bi,Kan Chen,Xiaowu Shu

DOI: https://doi.org/10.1117/1.oe.62.3.037107

IF: 1.3

2023-01-01

Optical Engineering

Abstract:We propose a monolithic integrated cavity optomechanical accelerometer based on push-pull photonic crystal zipper cavity. The accelerometer integrates grating couplers, phase modulators, acceleration sensing unit, and electrostatic force feedback module on a chip. We use push-pull structure to eliminate the coupling crosstalk caused by paraxial acceleration and extend its range using electrostatic force feedback module. The transmissive photonic crystal zipper cavity structure is adopted to improve the integration and stability of the system. Accurate results are demonstrated as follows: the bandwidth is larger than 20 kHz, the mechanical sensitivity is 369 pm/g, the measuring range is +/- 100g, and the noise equivalent acceleration is 5.06 mu g/Hz. With its advantages, the accelerometer can be used in consumer electronics, aerospace, resource exploration, and other fields. (c) 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
Theoretical Model and Design of Highly Sensitive Reflective Fiber Optic Fabry-Pérot Cavity Accelerometer Independent of Fiber Stiffness

Qinpeng Liu,Xingrui Li,Danyang Wang,Hong Gao,Dakuan Yu

DOI: https://doi.org/10.1109/jsen.2024.3352583

IF: 4.3

2024-03-02

IEEE Sensors Journal

Abstract:The sensitivity of an accelerometer-based on fiber Bragg grating (FBG) is limited by the stiffness of the encapsulated fiber, and this article is inspired to research the highly sensitive accelerometer of the Fabry-Pérot (F-P) cavity with wavelength demodulation which is not affected by fiber stiffness. The mechanism of a new type of sensor based on the F-P cavity is researched, and the constraints of sensitivity and resonant frequency are researched systematically. The figure of merit is introduced to evaluate the comprehensive performance of the accelerometer. Theoretical analysis indicates that the F-P cavity accelerometer does have a good advantage, its sensitivity is two orders of magnitude higher than that of the FBG accelerometer. The experimental results show that the bandwidth of the sensor ranges from 10 to 350 Hz, a corresponding sensitivity range is from 5.95 to 10.12 nm/G, and the figure of merit is 6278.4 nm Hz/G. Thus, it can be sufficiently demonstrated that the model has the potential advantages of ultrahigh sensitivity and miniaturization, which have potential theoretical significance and practical application value in the field of vibration signal detection.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Ultra-high-resolution phase demodulation based miniature fiber-optic accelerometer at low and medium frequencies

Jiayu Huang,Yajie Zhang,Min Guo,Guangyin Zhang,Xinyu Zhao,Chenxi Li,Ke Chen

DOI: https://doi.org/10.1016/j.optlastec.2024.110753

IF: 4.939

2024-03-02

Optics & Laser Technology

Abstract:A miniature fiber-optic Fabry–Perot (F-P) accelerometer based on phase demodulation is demonstrated for improving sensitivity. The accelerometer is composed of a 11.5 mm diameter cylindrical outer frame, a spring-like diaphragm with a loaded mass block and optical fiber. This structure is not only simple and easy to manufacture, but also greatly improves the performances of the accelerometer. The F-P cavity length is demodulated by phase demodulation with abundant advantages of wide dynamic range, high resolution, independent of fiber loss and light intensity fluctuations. The inertial mass displacement indicating a variation in the F-P cavity length is demodulated and converted to acceleration. Through experimental verification, the resonant frequency of the accelerometer is 232 Hz, and axial sensitivity is flat in 30–180 Hz. The average sensitivity of the flat area is 17.55 μm/g and the transverse crosstalk is around 3 %. The resolution of the sensing system is 2.8 μg within a ±3 mm maximum measurement range by experimental tests. This work gives a fitting option to monitor low and medium frequency vibration in a large range of areas.

optics,physics, applied
Fiber Optic Accelerometer Based on Fiber-Mirror Interference Cavity

LIN Qiao,CHEN Liu-hua,LI Shu,WU Xing-kun

DOI: https://doi.org/10.3788/ope.20111906.1179

2011-01-01

Abstract:An optical fiber accelerometer was designed based on a fiber-mirror interference cavity.The sensing principle and elastic structure of the accelerometer were introduced and its performance was measured.A silicon micro-mirror mounted on a mesh spring elastic structure and a fiber facet were used to form a fiber-mirror cavity to generate optical interference signals as a function of acceleration.A Phase Generated Carrier(PGC) technology was adopted to modulate the interference signals to obtain phase difference signals with high resolution.Finally,the strain analysis of elastic structure was performed by Cosmosworks(Solidworks) to calculate the sensitivity.The performance measurement of prototype shows that the accelerometer can offer a sensitivity of 63.2 rad/g in the resonance frequency of 160 Hz and a resolution of 4 μg with a dynamic range near 108.Furthermore,the accelerometer is structure simple and easy to be intergrated and multi-dimensioned.
A High-Resolution Fiber Optic Accelerometer Based on Intracavity Phase-Generated Carrier (PGC) Modulation

Qiao Lin,Liuhua Chen,Shu Li,X. Wu

DOI: https://doi.org/10.1088/0957-0233/22/1/015303

2010-01-01

Abstract:A compact-size fiber optic accelerometer was designed to achieve both high resolution and wide dynamic range concurrently. An optical cavity, with its length modulated by a piezoelectric oscillator at audio frequency, is utilized to resolve the nanometer-level displacement of a silicon micro-mirror which serves as an inertial mass for acceleration sensing. Strain analysis of the proof-mass flexure structure by Cosmosworks was carried out to calculate responsivity and resonance frequency for a comparison with experimental measurement. The responsivity below the structural resonance frequency of 160 Hz reaches 36 dB re 1 rad/g. Performance measurement demonstrated that the accelerometer was able to resolve an acceleration of 48 ng Hz(-1/2) with a dynamic range of 2 x 10(7).
A High-Frequency Acceleration Sensor Based on Fiber Grating

Hao Wu,Qijing Lin,Na Zhao,Libo Zhao,Guoxi Luo,Zhuangde Jiang

DOI: https://doi.org/10.1109/tim.2021.3073394

IF: 5.6

2021-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:Fiber Bragg grating (FBG) acceleration sensor is an important branch of FBG application and has irreplaceable advantages compared with an electronic accelerometer. An FBG acceleration sensor with high sensitivity and high natural frequency is designed. This sensor adopts a double cantilever structure to sense the vibration perpendicular to the axis. Compared with a single cantilever structure, the natural frequency is increased without reducing the sensing length. Through the above structure design and material selection, the sensor shows a high natural frequency of 8658 Hz and its sensitivity is 0.44 pm/g. After the photoelectric demodulation is used, the sensitivity is 52 mV/g and the linearity is 0.998. Through the experiment and simulation analysis, the sensor performs good anti-interference in the transverse direction and temperature compensation in the process of vibration measurement. The system is very small due to the use of light intensity demodulation technology, which is conducive to application and integration in actual measurement scenarios.

engineering, electrical & electronic,instruments & instrumentation
Temperature-Insensitive Fibre-Optic Acceleration Sensor Based On Intensity-Referenced Fibre Bragg Gratings

Liqun Sun,Bo Dong,Yongxin Wang,Evan LALLY,Anbo Wang

DOI: https://doi.org/10.1088/0256-307X/25/10/020

2008-01-01

Chinese Physics Letters

Abstract:A temperature-insensitive acceleration sensor using two fibre Bragg gratings (FBGs), based on reflection spectrum intensity modulation and optical power detection, is proposed and demonstrated. A cantilever beam is used to generate acceleration-induced axial strain along two sensing gratings, which are glued on the two opposite surfaces of the beam. Because the two gratings operate within the linear spectral range of a light source, formed by a thermally-tunable extrinsic Fabry-Perot optical filter, the intensity difference of the two reflections from the gratings is proportional to the acceleration applied. This eliminates the need for sophisticated wavelength interrogation of the gratings, and it also endows the sensor with immunity to temperature variation. Compared with a commercial micromachined accelerometer, the sensor is proven to be capable of accurately detecting acceleration.
Miniature Fiber Pressure Sensor Based on an In-Fiber Confocal Cavity

Tingting Wang,Yixian Ge,Haibin Ni,Jianhua Chang,Jiahong Zhang,Wei Ke

DOI: https://doi.org/10.1016/j.ijleo.2018.06.151

IF: 3.1

2018-01-01

Optik

Abstract:A new type of miniature pressure sensor based on a hybrid Fabry-Perot (F-P) interferometer is proposed. The in-line air cavity of the sensor is a micro-confocal air cavity, which is formed by splicing together a single mode fiber (SMF) and a solid-core photonic crystal fiber (PCF) with the specific splicing parameters. The sensor is fabricated by simple steps involving only fusion splicing, cleaving and polishing. Optical interference principle of the sensor is analyzed and the parameters in sensor design are discussed. Due to low propagation loss, experiments show that the reflection spectrum of the sensor has a fringe contrast of more than 30 dB. By tracing the trough wavelength in the interference spectrum, the pressure can be demodulated. Within the pressure measurement range of 0-1 MPa, the sensitivity is -193 pm/MPa. The experimental results indicate that the deflection is consistent with the theoretical analysis and the sensor has a good linearity. Easy fabrication, low-cost and high-contrast make it appropriate for practical application.
Non-contact Fiber Vibration Sensor based on Intracavity Modulation of an Extrinsic Fabry-Perot Interferometer

jingjing guo,changxi yang

DOI: https://doi.org/10.1109/JSEN.2015.2464679

2015-01-01

Abstract:This paper describes a phase demodulated fiber-optic sensor suitable for non-contact vibration detection. The sensor is based on an extrinsic Fabry-Perot (F-P) cavity, formed by a capsulated sensor head and the probed surface. The sensor head, bonded on a piezoelectric (PZT) stack is driven by a continuous sinusoidal wave, which introduces phase modulation in the interference signal. The varied small displacement induced by vibration of the surface under test is detected utilizing an improved Phase Generated Carrier (PGC) technique. The configured F-P sensor is compact and highly sensitive, since neither extra optical path nor frequency modulation of light source is employed for demodulation. Characterization experiment is also conducted using a PZT vibration exciter. The sensor exhibits a high signal-to-noise ratio (SNR) of 41 dB at 1 kHz and noise limited detectable phase level of 6.3×10-5 rad, corresponding to a minimum vibration sensitivity of 7.8 pm.
Miniaturized fiber Bragg grating accelerator sensors for low-frequency vibration monitoring

XiaoMei Wang,RuiMing Zhang,Xiaoyong Fan,YunTian Teng,YiXiang Tang

DOI: https://doi.org/10.1364/AO.496818

2023-09-20

Abstract:Acceleration monitoring is an important technical means of seismic monitoring, oil exploration, deep well observation, etc. A miniaturized fiber Bragg grating (FBG) acceleration sensor with three cantilever beams is proposed against the fact that it is difficult for fiber-optic sensors to meet the requirements for low-frequency vibration monitoring. First, the model of the FBG acceleration sensor was built and theoretically analyzed; second, the effect of structural parameters on sensor sensitivity and natural frequency was analyzed, and the sensors were subjected to static stress analysis and modal simulation analysis through the ANSYS finite element analysis software; finally, the real sensors were developed and subjected to performance tests with a low-frequency vibration test system. According to the result, the natural frequency of the sensor is about 64 Hz, and its sensitivity is 201.3 pm/g; favorable linearity is observed at the working frequency band of 0.1-40 Hz, and the transverse interference is less than 2.51%. The research findings offer a reference for the development of like sensors and the further exploration of the lower limit of low frequency.
An FBG-FPI Accelerometer Based on Femtosecond Laser-Written Ultrashort Fiber Bragg Gratings

Xingyong Li,Xin Liu,Shuangshuang Li,Tianxin Duan,Ruohui Wang,Fengyi Chen,Xueguang Qiao

DOI: https://doi.org/10.1109/tim.2024.3462981

IF: 5.6

2024-10-04

IEEE Transactions on Instrumentation and Measurement

Abstract:We demonstrate an improved Fabry-Pérot interferometer (FPI) fiber accelerometer using ultrashort fiber Bragg gratings (FBGs) fabricated with femtosecond laser plane-by-plane direct writing. The length of these ultrashort FBGs ranges from 30 to m, with a 3-dB bandwidth spanning 24.25–7.08 nm. Two identical ultrashort FBGs create FP interference along the grating's Gaussian spectral line, achieving a high extinction ratio (>26 dB). The fabricated ultrashort FBGs and FBG-FP interferometric structures exhibit high-temperature stability in the C– C range, with the temperature sensitivities of 12.67 pm/°C and 12.75 pm/°C, respectively. The interferometric fiber accelerometers are formed by combining ultrashort FBGs with a spring-mass transducer structure and 5 m of sensing fiber, showcasing the sensitivities of approximately 90 rad/g within the operational frequency band of 10–500 Hz. The linearity is impressively high at 99.98%, and the accelerometers operate reliably in the temperature range of C– C. The accelerometers are simple to manufacture, compact, and highly temperature-resistant. In addition, this accelerometer can cascade to realize multipoint quasi-distributed detection based on -OTDR technology, which is expected to play an important role in the seismic exploration of deep oil and gas wells.

engineering, electrical & electronic,instruments & instrumentation
A Novel Differential Optical Fiber Accelerometer

Shaohua Pi,Jiang Zhao,Guangwei Hong,Bo Jia

DOI: https://doi.org/10.1117/12.2034372

2013-01-01

Abstract:The development of sensitive fiber-optic accelerometers is a subject of continuing interest. To acquire high resolution, Michelson phase interferometric techniques are widely adopted. Among the variety structures, the compliant cylinder approach is particularly attractive due to its high sensitivity that is defined as the induced phase shift per applied acceleration. While the two arms of Michelson interferometer should be at the same optical path, it is inconvenient to adjust the two arms' length to equal, also the polarization instability and phase random drift will cause a signal decline. To overcome these limitations, a novel optical fiber accelerometer based on differential interferometric techniques is proposed and investigated. The interferometer is a Sagnac-like white light interferometer, which means the bandwidth of laser spectrum can be as wide as tens nanometers. This interferometer was firstly reported by Levin in 1990s. Lights are divided to two paths before entering the coupler. To induce time difference, one passes through a delay arm and another goes a direct arm. After modulated by the sensing component, they reflect to opposite arm. The sensing part is formed by a seismic mass that is held to only one compliant cylinder, where the single-mode optical fiber is wrapped tightly. When sticking to vibrations, the cylinder compresses or stretches as a spring. The corresponding changes in cylinder circumference lead to strain in the sensing fibers, which is detected as an optical phase shift by the interferometer. The lights from two arms reach the vibration source at different time, sensing a different accelerate speed; produce a different optic path difference. Integrating the dissimilarity of the accelerated speed by time can obtain the total acceleration graph. A shaker's vibration has been tested by the proposed accelerometer referring to a standard piezoelectric accelerometer. A 99.8% linearity of the optical phase shift to the ground acceleration is achieved. The acceleration sensitivity is 300 rad/g. It proves to have a simple structure, good practice, reliable measurement and stable performance.
Sensitivity enhancement of interferometric fiber-optic accelerometers using multi-core fiber

Xin Liu,Ruohui Wang,Fengyi Chen,Xueguang Qiao

DOI: https://doi.org/10.1016/j.optlastec.2023.109818

2023-07-22

Abstract:We propose and demonstrate a novel method for improving the sensitivity of fiber-optic interferometric accelerometers based on multi-core fiber space division multiplexing technology. In this method, MCF is used to replace the single-mode fiber as the sample arm of the conventional interferometers. MCF and a pair of fan-in/fan-out devices are used to build a Mach–Zehnder interferometric accelerometer to experimentally demonstrate the sensitivity enhancement. The proposed accelerometer has a working frequency bandwidth from 0.5 Hz to 90 Hz, and achieves a 5-fold sensitivity enhancement from 191.15 rad/g for single-core to 965.25 rad/g at 80 Hz. The multicore fiber solution can be an universal method to enhance acceleration sensitivity of all interferometric accelerometers. Moreover, the same sensitivity of the sensors can be achieved by using shorter length of MCF, which can further reduce the size of three-components accelerometers.

optics,physics, applied
An Acoustic Sensor Based on Active Fiber Fabry-Pérot Microcavities

Xin-Xia Gao,Jin-Ming Cui,Ming-Zhong Ai,Yun-Feng Huang,Chuan-Feng Li,Guang-Can Guo

DOI: https://doi.org/10.3390/s20205760

2020-10-11

Abstract:We demonstrate an active acoustic sensor based on a high-finesse fiber Fabry-Pérot micro-cavity with a gain medium. The sensor is a compacted device lasing around 1535 nm by external optical pumping. The acoustic pressure acting on the sensor disturbs the emitted laser frequency, which is subsequently transformed to beat signals through a delay-arm interferometer, and directly detected by a photo-detector. In this configuration, the sensing device exhibits a high sensitivity of 2.6 V/Pa and a noise equivalent acoustic signal level of 230 μPa/Hz1/2 at a frequency of 4 kHz. Experimental results provide a wide frequency response from 100 Hz to 18 kHz. As the sensor works at communication wavelength and the output laser can be electrically tuned in the 10 nm range, a multi-sensor network can be easily constructed with the dense wavelength division multiplexing devices. Extra lasers or demodulators are unnecessary thus the proposed sensor is low cost and easy fabrication. The proposed sensor shows broad applications prospect in remote oil and gas leakage exploration, photo-acoustic spectrum detection, and sound source location.
A Vibration Sensor Based on Fiber Bragg Grating Fabry-Perot Cavity

成振龙 Cheng Zhen-long,潘子军 Pan Zi-jun,吕全超 Lv Quan-chao,赵建林 Zhao Jianlin,樊. F. Fan,周王民 Zhou Wang-min

DOI: https://doi.org/10.3788/GZXB20103901.0047

Abstract:A sensor solution for weak vibration based on Fiber Bragg Grating Fabry-Perot(F-P) cavity is designed and experimentally demonstrated,in which a laser with single-frequency is used as the light source.The F-P cavity is affixed to the cantilever structure of even distribution of strain along the axis and the pair of fiber Bragg gratings as the cavity reflectors is placed freely.The vibration spreading to fiber grating F-P cavity through the cantilever beam vibration,causes changes in cavity length,thus changing the reflective light intensity of fiber grating F-P cavity.Theoretical analysis indicates that,the amplitudes and frequencies of vibration can be measured by demodulating the peaks and frequencies of the signal.The experimental results of measuring artificial vibration simulated with PZT agree with the theory well.This sensor has high measuring accuracy and can be used for detecting weak vibration.

Physics,Engineering,Materials Science
A Novel Fiber Bragg Grating Accelerometer

Liu Bo,Niu Wencheng,Yang Yifei,Luo Jianhua,Cao Ye,Kai Guiyun,Zhang Weigang,Dong Xiaoyi

DOI: https://doi.org/10.3321/j.issn:0254-3087.2006.01.010

2006-01-01

Abstract:A novel fiber grating accelerometer is presented, which uses FBG as basic sensing element based on cantilevered beam. This FBG accelerometer achieves +/-10 g of full scale and 10 mg of sensitivity. The sensing frequency is below 100 Hz. Compared with traditional fiber accelerometer, the FBG accelerometer has more stability and anti-jamming. Furthermore, it can easily construct sensing net for the WDM characteristics of FBG.
The Design and Simulation of a Coarse-to-Fine Optical MEMS Accelerometer

Mojtaba Rahimi,Majid Taghavi,Mohammad Malekmohammad

DOI: https://doi.org/10.48550/arXiv.2109.09449

2021-08-29

Applied Physics

Abstract:In this paper, a novel coarse-to-fine optical MEMS accelerometer based on the Fabry Perot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the proof mass due to the applied acceleration is detected using two FP cavities which comprise the optical system of the device. Using coarse-to-fine measurement and the dual-wavelength method increases the sensitivity of the accelerometer as well as the linear measurement range simultaneously. The optical simulation shows that the sensitivity of the proposed device is 10 times as high as that of a similar optical MEMS accelerometer with one FP cavity. In addition, the proposed optical system is insensitive to the displacements of the proof mass in orthogonal directions as a result of which cross-axis sensitivity is considerably reduced. The minimum feature size of the structure is 15 um and the optical signal is conducted completely through the optical fibers, facilitating the fabrication of the device. The simulation results are as follows: mechanical sensitivity of 190 nm/g, optical sensitivity of 8 nm/g, linear measurement of 5 g, and first resonance frequency of 1141 Hz.
Highly sensitive multicore fiber accelerometer for low frequency vibration sensing

Josu Amorebieta,Ángel Ortega-Gómez,Gaizka Durana,Rubén Fernández,José Enrique Antonio-López,Axel Schülzgen,Joseba Zubia,Rodrigo Amezcua-Correa,Joel Villatoro

DOI: https://doi.org/10.1038/s41598-020-73178-x

2024-02-07

Abstract:We report on a compact, highly sensitive all-fiber accelerometer suitable for low frequency and low amplitude vibration sensing. The sensing elements in the device are two short segments of strongly coupled asymmetric multicore fiber (MCF) fusion spliced at 180° with respect to each other. Such segments of MCF are sandwiched between standard single mode fibers. The reflection spectrum of the device exhibits a narrow spectrum whose height and position in wavelength changes when it is subjected to vibrations. The interrogation of the accelerometer was carried out by a spectrometer and a photodetector to measure simultaneously wavelength shift and light power variations. The device was subjected to a wide range of vibration frequencies, from 1 mHz to 30 Hz, and accelerations from 0.76 mg to 29.64 mg, and performed linearly, with a sensitivity of 2.213 nW/mg. Therefore, we believe the accelerometer reported here may represent an alternative to existing electronic and optical accelerometers, especially for low frequency and amplitude vibrations, thanks to its compactness, simplicity, cost-effectiveness, implementation easiness and high sensitivity.

Optics,Instrumentation and Detectors
Cascadable four-core fiber-Bragg gratings accelerometer for 2-dimension low-frequency vibration measurement

Junzhong Li,Dexing Yang,Yajun Jiang,Chi Liu,Xiaokang Li,Jie Zou,Yizhuo Chong,Ruilong Lv,Qinghao Bin,Jiahui Yan,Peiqi Yuan,Xiaowei Ding,Wei Li,Deng Pan,Congjing Hao,Dong Li,Congjing

DOI: https://doi.org/10.1109/jsen.2023.3298430

IF: 4.3

2023-01-01

IEEE Sensors Journal

Abstract:A 2-D vector vibration sensor is designed and fabricated by using an optical fiber double-clamped beam with four-core fiber Bragg gratings (FBGs) and a mass block that is glued in the middle of the fiber. Vectorial acceleration perpendicular to the fiber can be measured using two mutually orthogonal FBG-pairs in the four-core fiber to obtain the 2-D vibrating information. The experimental results show that the sensor possesses a 2-D vectorial acceleration sensitivity of 345 pm/g in the flat response region of 5–30 Hz, and it is temperature insensitive, compact, and cascadable. Both resonance frequency and sensitivity can be improved by optimizing the length and weight of the free fiber. The proposed sensor has potential applications for dynamic monitoring in oil exploration, seismic exploration, and heart rate monitoring.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System

Guanghui Li,Changchun Cai,Yan Zhang,Xiong Deng,Liangzhong Lin,Wenbo Xiao

DOI: https://doi.org/10.1109/jsen.2023.3347091

IF: 4.3

2024-02-16

IEEE Sensors Journal

Abstract:In this article, a novel optical micro-electromechanical system (MEMS) acceleration sensor based on a metal Fabry–Pérot (FP) microcavity is investigated using the transfer matrix method (TMM) and finite element analysis (FEA). The analytical calculation and simulation results show that the accelerometer has a wide measurement range, high sensitivity and resolution, good linearity, and low cross-axis sensitivity over the whole wavelength modulation range. The accelerometer has a linear measurement range of ±251 g, an optical system sensitivity of 1.9038, a mechanical sensitivity of 10.92 nm/g, a cross-axis sensitivity on the orthogonal axis as low as 0.09%, an accelerometer sensitivity up to 20.79 nm/g, and a resolution of ( = 1 pm). These functional characteristics make the proposed sensor have important application prospects in the fields of portable devices, biomedicine, and the Internet of Things, as well as autonomous driving and aerospace.

engineering, electrical & electronic,instruments & instrumentation,physics, applied

An In-Fiber Acceleration Sensor Based on Fabry–Perot Cavity

Monolithic Integrated Cavity Optomechanical Accelerometer Based on Push-Pull Photonic Crystal Zipper Cavity

Theoretical Model and Design of Highly Sensitive Reflective Fiber Optic Fabry-Pérot Cavity Accelerometer Independent of Fiber Stiffness

Ultra-high-resolution phase demodulation based miniature fiber-optic accelerometer at low and medium frequencies

Fiber Optic Accelerometer Based on Fiber-Mirror Interference Cavity

A High-Resolution Fiber Optic Accelerometer Based on Intracavity Phase-Generated Carrier (PGC) Modulation

A High-Frequency Acceleration Sensor Based on Fiber Grating

Temperature-Insensitive Fibre-Optic Acceleration Sensor Based On Intensity-Referenced Fibre Bragg Gratings

Miniature Fiber Pressure Sensor Based on an In-Fiber Confocal Cavity

Non-contact Fiber Vibration Sensor based on Intracavity Modulation of an Extrinsic Fabry-Perot Interferometer

Miniaturized fiber Bragg grating accelerator sensors for low-frequency vibration monitoring

An FBG-FPI Accelerometer Based on Femtosecond Laser-Written Ultrashort Fiber Bragg Gratings

A Novel Differential Optical Fiber Accelerometer

Sensitivity enhancement of interferometric fiber-optic accelerometers using multi-core fiber

An Acoustic Sensor Based on Active Fiber Fabry-Pérot Microcavities

A Vibration Sensor Based on Fiber Bragg Grating Fabry-Perot Cavity

A Novel Fiber Bragg Grating Accelerometer

The Design and Simulation of a Coarse-to-Fine Optical MEMS Accelerometer

Highly sensitive multicore fiber accelerometer for low frequency vibration sensing

Cascadable four-core fiber-Bragg gratings accelerometer for 2-dimension low-frequency vibration measurement

High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System