Fiber Optic Accelerometer Based on Fiber-Mirror Interference Cavity

LIN Qiao,CHEN Liu-hua,LI Shu,WU Xing-kun
DOI: https://doi.org/10.3788/ope.20111906.1179
2011-01-01
Abstract:An optical fiber accelerometer was designed based on a fiber-mirror interference cavity.The sensing principle and elastic structure of the accelerometer were introduced and its performance was measured.A silicon micro-mirror mounted on a mesh spring elastic structure and a fiber facet were used to form a fiber-mirror cavity to generate optical interference signals as a function of acceleration.A Phase Generated Carrier(PGC) technology was adopted to modulate the interference signals to obtain phase difference signals with high resolution.Finally,the strain analysis of elastic structure was performed by Cosmosworks(Solidworks) to calculate the sensitivity.The performance measurement of prototype shows that the accelerometer can offer a sensitivity of 63.2 rad/g in the resonance frequency of 160 Hz and a resolution of 4 μg with a dynamic range near 108.Furthermore,the accelerometer is structure simple and easy to be intergrated and multi-dimensioned.
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