Abstract:Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based on a subwavelength grating pair that can be easily fabricated by a single Silicon-on-insulator (SOI) chip. The parameters of the subwavelength grating pair-based optical readout, including period, duty cycle, thickness of grating and metal film, and the distance of the air gap, were optimized by combining a genetic algorithm and rigorous coupled wavelength analysis (RCWA) to obtain the optimal sensitivity to the displacement of suspended grating element and the acceleration. A corresponding mechanical design was also completed to meet the highly sensitive acceleration measurement requirement while considering the mechanical cross-axis sensitivity, dynamic range, bandwidth, and fabrication feasibility. This device was verified by both RCWA and finite-different-time-domain methods, and a tolerance analysis was also completed to confirm that it is able to achieve the extremely high optical displacement sensitivity of 1.8%/nm, acceleration-displacement sensitivity of 1.56 nm/mg, and acceleration measurement sensitivity of more than 2.5%/mg, which is almost one order of magnitude higher than any reported counterparts. This work enables a single SOI-based high performance accelerometer, and provides a theoretical basis and fabrication guides for the design.

A New High-Precision Micro-Accelerometer Based on Optomechanical System

Monolithic Integrated Cavity Optomechanical Accelerometer Based on Push-Pull Photonic Crystal Zipper Cavity

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Design and Realization of a High-Precision Cavity Optomechanical Accelerometer

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

High-precision Vibration Detection Based on Nano-Cavity Optomechanical Accelerometer

Accurate mechanical-optical theoretical model of cross-axis sensitivity of an interferometric micro-optomechanical accelerometer

A Novel Scheme Design of a High-G Optical NEMS Accelerometer Based on a Single Chip Grating with Proper Sensitivity and Large Bandwidth

A Compact Micromachined Interferometric Accelerometer Based on the Diffraction Grating

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

A Chip-Scale Silicon Cavity Optomechanical Accelerometer with Extended Frequency Range

Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers

Optimal design of high sensitive integrated optical accelerometer

A microchip optomechanical accelerometer

Broadband Optomechanical Accelerometer Reaching the Thermomechanical Limit Based on Suspended Si3N4 Membrane Resonator

Intrinsically accurate sensing with an optomechanical accelerometer

Design and Simulation of Photonic Crystal Optomechanical Two-Axis Differential Accelerometer

High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System