Abstract:We demonstrate a microfabricated optomechanical accelerometer that is capable of percent-level accuracy without external calibration. To achieve this capability, we use a mechanical model of the device behavior that can be characterized by the thermal noise response along with an optical frequency comb readout method that enables high sensitivity, high bandwidth, high dynamic range, and SI-traceable displacement measurements. The resulting intrinsic accuracy was evaluated over a wide frequency range by comparing to a primary vibration calibration system and local gravity. The average agreement was found to be 2.1 % for the calibration system between 0.1 kHz and 15 kHz and better than 0.2 % for the static acceleration. This capability has the potential to replace costly external calibrations and improve the accuracy of inertial guidance systems and remotely deployed accelerometers. Due to the fundamental nature of the intrinsic accuracy approach, it could be extended to other optomechanical transducers, including force and pressure sensors.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to develop a micromachined optomechanical accelerometer that can achieve percentage - level precision without external calibration. Specifically, the research team demonstrated an accelerometer based on optomechanical principles, which can characterize device behavior through thermal - noise response and optical - frequency - comb read - out methods, thereby achieving high - sensitivity, high - bandwidth, high - dynamic - range, and displacement measurements traceable to the International System of Units (SI). This method can not only reduce the need for external calibration but also improve the accuracy of inertial navigation systems and remotely - deployed accelerometers. In addition, because its inherent accuracy method is fundamental in nature, this technology can also be extended to other optomechanical sensors, such as force sensors and pressure sensors. The key innovation points of the paper are: 1. **Inherent accuracy**: By using mechanical models and thermal - noise responses to characterize device behavior, the problem of external calibration required by traditional accelerometers is avoided. 2. **Optical - frequency - comb read - out method**: The displacement of the proof mass is directly measured using an optical - frequency - comb, which avoids dynamic - range and accuracy limitations while providing direct SI traceability. 3. **Wide test - frequency range**: The inherent accuracy of the accelerometer was evaluated in a wide frequency range from 0.1 kHz to 15 kHz and under static acceleration. The results show that its average consistency is 2.1% and the accuracy under static acceleration is better than 0.2%. These innovations make this accelerometer have important application potential in fields such as remote deployment, gravimetry, and inertial navigation.

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