Abstract:Accelerometers are one of the most widely used sensors. They are essential in many applications such as inertial measurement units (IMUs), airbags safety systems, activity monitoring in biomedical applications, and vibration analysis of industrial machinery. Some of these applications may need high immunity to Electromagnetic Interference (EMI). Optical accelerometers can provide such an advantage and usually shows better sensitivity. However, most of the previous versions involved optical fibers, which hindered their monolithic microfabrication. The few optical accelerometers suited for mass production presented previously in literature suffered from some other drawbacks, besides measuring in one direction (1D) only. In this work, we present a novel optical accelerometer that enables measurements in 3D, besides facilitating monolithic fabrication and simple assembly. The operation principle is based on power modulation technique that does not need complicated processing and achieves real-time measurements. The device consists of a light-emitting diode (LED), a quadrant photodetector and a proof mass suspended between them by springs allowing it to move along the 3-axes. When the proof mass moves due to the applied acceleration, more light will pass to some panels of the quadrant detector while others will receive less light, according to the motion direction. The sensor design, implementation scheme, mechanical simulation and optical modeling are reported. COMSOL finite element analysis (FEA) simulation shows a mechanical sensitivity exceeding 3.7µm/G. The modeling for both mechanical, optical and electrical transductions shows a total sensitivity up to 100 µA/G. The mechanical part of the device is fabricated using the SOIMUMPs process.

The Design and Simulation of a Coarse-to-Fine Optical MEMS Accelerometer

Monolithic Integrated Cavity Optomechanical Accelerometer Based on Push-Pull Photonic Crystal Zipper Cavity

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

A Novel Scheme Design of a High-G Optical NEMS Accelerometer Based on a Single Chip Grating with Proper Sensitivity and Large Bandwidth

A Compact Micromachined Interferometric Accelerometer Based on the Diffraction Grating

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution Via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

Design and Fabrication of a Differential MOEMS Accelerometer Based on Fabry Perot micro-cavities

High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System

A MEMS Based Fabry–Pérot Accelerometer with High Resolution

A High-sensitivity Optical MEMS Accelerometer Based on SOI Double-side Micromachining

Closed-Loop MOEMS Accelerometer

Micro-Opto-Electro-Mechanical System Accelerometer Based on Coarse-Fine Processing of Fabry–Perot Interferometer Signals

Low-Frequency High-Resolution Fiber Fabry-Perot Interferometric Accelerometer Based on Double-Spring-Supported Oscillator

A Seismic-Grade Optical MEMS Accelerometer with Force Feedback Control

Tri-axial optical MEMS accelerometer enables monolithic fabrication

A High-Sensitivity Dual-Axis Accelerometer with Two FP Cavities Assembled on Single Optical Fiber.