Abstract:In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is suspended by four springs. The applied acceleration tends to move the PM from its resting position. This mechanical displacement can be measured by the FP interferometer formed between the proof mass cross-section and the optical fiber end face. The proposed sensor is fabricated on a silicon on insulator (SOI) wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of 1g. Also, the optical sensitivity and resolution of the sensor in the static characterization are 6.52 nm/g and 153ug. The sensor sensitivity in the power measurement is 49.6 mV/g and its resonant is at 1372 Hz. Using the differential measurement method increases the sensitivity of the accelerometer. Based on experimental data, the sensor sensitivity is two times as high as that of a similar MOEMS accelerometer with one FP cavity.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the trade - off between improving sensitivity and measurement range in micro - electro - mechanical system (MEMS) accelerometers. Traditional MOEMS accelerometers based on Fabry - Perot (FP) micro - cavities will limit the measurement range while increasing sensitivity, and vice versa. This paper proposes an FP - MOEMS accelerometer based on a differential measurement method. By using two FP micro - cavities, this limitation can be overcome to achieve higher sensitivity without significantly sacrificing the measurement range. Specifically, the accelerometer design includes a proof mass (PM) suspended by four springs. When an acceleration is applied, the proof mass will move from its rest position, and this mechanical displacement can be measured by an FP interferometer. The sensor proposed in this paper utilizes two FP micro - cavities. When an acceleration is applied in the +y direction, the length of one FP micro - cavity decreases, and the length of the other FP micro - cavity increases, which causes the spectra to shift in opposite directions. Therefore, by measuring the difference in spectral shifts of the two FP micro - cavities, the optical sensitivity of the sensor can be doubled, that is, reaching 6.52 nm/g, which is twice that of a single - FP - micro - cavity sensor. In addition, this paper also describes in detail the sensor's design, simulation, manufacturing process, and the test results of static and dynamic characteristics, showing that the sensor has a good linear response within a ±1g measurement range and a resolution of 153 µg. These performance indicators show that the sensor maintains a wide measurement range while increasing sensitivity, and is suitable for application scenarios requiring high - precision acceleration measurement.

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