Research Of Signal Processing Circuit For Capacitive Acoustic Sensor

Tl Zhang,Mj Lan,Xy Tan,Xw Liu
2004-01-01
Abstract:A signal process circuit for capacitive acoustic sensor is described. The design of the circuit is based on 4 mum P-well CMOS process. The circuit system of capacitive acoustic sensor insists of frequency-modulated oscillator, differentiating circuit, pulse formation circuit, lowpass filter and amplifier. The frequency modulation output can avoid the disadvantage that the sensitivity of the microphone depends on the DC bias voltage in the classical method detecting the change of the capacitance. When a 10pF capacitance is connected with this circuit chip, the sensitivity is 1parts per thousand. The sensitivity of circuit is satisfied with measured desire of the signal process circuit for capacitive acoustic sensor.
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