Abstract:Hydrophones rely on high sensitivity to detect weak hydroacoustic signals, with the diaphragm structure design significantly impacting the sensitivity of MEMS piezoelectric hydrophones. Traditional optimization methods for hydrophone structure involve creating an equivalent circuit mathematical model or a finite element analysis model through simulation, starting with a structural model based on equivalent analogy or empirical knowledge, and proceeding with a parametric analysis of geometric structural parameters. However, these methods are computationally intensive and time-consuming, impeding structural design optimization. This paper presents an intelligent learning algorithm-based method for optimizing MEMS hydrophone structures, which aims to simplify the design process and enhance hydroacoustic reception. Orthogonal tests and finite element analysis models are utilized to collect simulation data, and neural network models are developed to illustrate the relationship between structural parameters and hydrophone performance. The diaphragm electrode thickness, piezoelectric layer thickness, diaphragm radius, and top electrode radius are optimized through a BP neural network enhanced by the particle swarm optimization algorithm. The model’s accuracy is validated through simulation testing, with the optimized hydrophone sensitivity and effective electromechanical coupling coefficient averaging 99.77% and 96.03%, respectively. A MEMS hydrophone is fabricated based on the design model’s optimization results, and experimental testing confirmed the design performance. This method can meet the design requirements of MEMS hydrophones with improved efficiency and precision, and can be extended to other MEMS sensors and actuators requiring structural parametric design.

Design of a charge-sensitive amplifier for MEMS piezoelectric hydrophone

A Novel MEMS Based Piezoresistive Vector Hydrophone for Low Frequency Detection

Design and Test about High Sensitivity Thin Shell Piezoelectric Hollow Sphere Hydrophone

A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone

Structural Optimization Design of MEMS Piezoelectric Hydrophones Based on Intelligent Learning Algorithm

A Piezoelectric AlN MEMS Hydrophone with High Sensitivity and Low Noise Density

Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

Design of the Monolithic Integrated Array MEMS Hydrophone

An Integrated Circuit Design For Piezoelectric Acoustic Microsensors

Design and Characterization of an Aluminum Nitride-Based MEMS Hydrophone With Biologically Honeycomb Architecture

Design and Implementation of a Composite Hydrophone of Sound Pressure and Sound Pressure Gradient

Enhanced Performance of Bionic Ciliary Piezoelectric Microsensor for Hydrodynamic Perception

MEMS flexible conformal hydrophone based on heterogeneous integration technology

Design and implementation of hollow cilium cylinder MEMS vector hydrophone

A Mathematical Model of a Piezoelectric Micro- Machined Hydrophone With Simulation and Experimental Validation

A Circuit Design in Piezoelectric Vibration Measurement System

Low-Cost, High-Sensitivity Hydrophone Based on Resonant Air Cavity

A ScAlN Piezoelectric High-Frequency Acoustic Pressure-Gradient MEMS Vector Hydrophone With Large Bandwidth

Design and realization of cap-shaped cilia MEMS vector hydrophone

A Design of Miniaturized High Performance Charge Amplifier