Fabrication of Robust Convex Array Microstructured PDMS-based Capacitance Sensor Molded by Laser Patterned Silicon for Human-being Acoustic Monitoring

Yuchao Zhu,Rui Zhou,Yuchao Yao,Shanglong Su,Zijun Wang,Huangping Yan
DOI: https://doi.org/10.1080/10667857.2022.2031491
2022-01-26
Materials Technology
Abstract:Flexible vibration sensors applied to acoustic recognition have been studied for using as skin-like electronics. However, the development of vibration sensors to recognise the human voice accurately with stable frequency response, high sensitivity and flexible/conformable form factor has proved to be a major challenge. A flexible capacitive acoustic sensor made of convex array microstructured polydimethylsiloxane film has been proposed to detect the acoustic range of human beings. Performances in the voice response range, including sensitivity, detection limit and dynamic response, were explored and delivered an excellent result due to its unique air void structures. The sensor with such a dielectric layer exhibited high sensitivity (at least 2.01 kPa−1 under 1.06 Pa), wide strength range (0–833.33 kPa), low detection limit (~0.14 Pa) and good cyclic stability (>2000 cycles of different pressures). Our device is suitable for several promising voice-recognition applications, such as home automation, remote control systems and vocal healthcare.
materials science, multidisciplinary
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