New Small Capacitance Measuring Circuit for Capacitance Sensor

王雷,王保良,冀海峰,黄志尧,李海青
DOI: https://doi.org/10.3969/j.issn.1004-1699.2002.04.001
2002-01-01
Abstract:A new small capacitance measuring circuit based on charge amplifier principle was developed for capacitance sensor. The advantages of this circuit are stray immune, high resolution because of no effect of charge injection and high data acquisition rate because of no filter in this circuit. Test results show that the linearity of this circuit is good, the sensitivity of 4.8 mV/fF and resolution of 0.5 fF can be achieved.
What problem does this paper attempt to address?