Research of Detecting Technique of Micro Differential Capacitance

朱武,张佳民,熊斌,车录锋,王跃林
DOI: https://doi.org/10.3969/j.issn.1671-7449.2004.03.004
2004-01-01
Abstract:It is difficult to improve the resolution and the stability of microaccelerometer due to limited open loop gain of single amplifier in the test of capacitive microaccelerometer. In this paper, the advanced techniques of composite amplifier and ground to ground demodulation were used to handle high frequency weak signal with high precision. Expermental result shows that the lowest differential capacitance tested in the circuit reaches to 5 aF(5×10-18 F).
What problem does this paper attempt to address?