Abstract:Abstract Based on the current design and application of the chip and the research status at home and abroad, we proposed a silicon micro-accelerometer analog front-end integrated circuit with high resolution and wide capacitance application range by using SMIC 0.18μm CMOS technology. The circuit is composed of a capacitive readout circuit, a demodulator, and a low-pass filter. To detect the weak capacitive signal, the capacitor readout circuit of this paper adopts the continuous-time voltage mode charge amplifier structure and combines with the signal modulation technology and the optimization of the MOS transistor size to achieve low noise and high resolution. With the application of the signal modulation technology, the low-frequency capacitance sensor signal is shifted from 2-12 kHz to high-frequency 800 kHz. The signal modulation technology modulates the low-frequency capacitive sensor signal of 2~12 kHz at the high frequency of 800 kHz, and the signal is converted into voltage through the capacitive readout circuit. The simulation results show that the designed analog front-end circuit can convert the accelerometer capacitance signal with the frequency of 2~12 kHz, the dynamic capacitance peak is 0.108 pF, and the static capacitance is 10 pF into the expected voltage signal. In addition, the output noise can be as low as 556 nV/√Hz in the capacitive frequency range of the accelerometer, which meets the requirement of 2.5 aF capacitive resolution. Therefore, the silicon micro-accelerometer analog front-end circuit designed in this paper has the characteristics of a wide capacitor application range, low noise, and high resolution, and can be widely used.

A Comparison Between Analog and Digital Capacitive Accelerometer

One Method to Improve the Temperature Stability of Processing Circuit of Digital Accelerometer

Digital Capacitance Measurement System Based on FPGA

A Low-Power Digital Processing Circuit for Capacitive Accelerometer

Noise Analysis and Parameter Optimization of Digital MEMS Accelerometer System

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

Design of Force-Balance Capacitive Accelerometer

Research Progress on Interface Circuit of Capacitive Micro Accelerometer.

Design Of The Closed-Loop Capacitive Micro-Accelerometer Based On Pspice

Performance Analysis of a Digital Capacitance Measuring Circuit.

Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer

Low Noise Interface ASIC of Capacitive MEMS Accelerometer

A Pseudo-Differential Capacitive MEMS Accelerometer Analog Front-End Design

Design of Interface Circuit of Closed-Loop Accelerometer with Self-Test Function

Noise analysis and characterization of a full differential CMOS interface circuit for capacitive closed-loop micro-accelerometer

A Digital Readout Interface For A Surface Micromachined Mems Accelerometer With A Novel Loop Compensator

Cmos Interface Circuitry For A Closed-Loop Capacitive Mems Accelerometer

Digital integrated interface of MEMS accelerometer

Design of Micromachined Capacitive Accelerometer System

Study of Testing System for Digital Accelerometer

Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer