Abstract:High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

Digital integrated interface of MEMS accelerometer

A Comparison Between Analog and Digital Capacitive Accelerometer

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

The Modulation and Demodulation Module of a High Resolution MOEMS Accelerometer

One Method to Improve the Temperature Stability of Processing Circuit of Digital Accelerometer

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Noise Analysis and Parameter Optimization of Digital MEMS Accelerometer System

A Compact Micromachined Interferometric Accelerometer Based on the Diffraction Grating

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

Monolithic Integrated Cavity Optomechanical Accelerometer Based on Push-Pull Photonic Crystal Zipper Cavity

Design of a Digitized Vibration Detector Implemented by CMOS Digitized Capacitive Transducer with In-Plane SoI Accelerometer

A System Design Method of Micro-G Silicon Accelerometer with A Cmos Precision Interface Circuit

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

A Novel Mash 2-1 Sigma-Delta A/D Converter with High-To-Low Conversion for Closed-Loop Mems Accelerometer Interface

Design of MEMS High-G Micro Accelerometer Temperature Compensation

Summary of Research Status and Application of MEMS Accelerometers

Optical Interferometric MEMS Accelerometers

A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes

Research progress of silicon resonant MEMS accelerometer

Monolithic Integration of Multiple Sensors on a Single Silicon Chip