Abstract:The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance, e.g., bulk-acoustic wave filters with low insertion loss and low noise or fast and reliable MEMS switches. However, the cross-hierarchical modelling of micro-electronic and micro-electromechanical constituents together in one multi-physical design process is still not as established as the design of integrated micro-electronic circuits, such as operational amplifiers. To close the gap between micro-electronics and micro-electromechanics, this paper presents an analytical approach towards the linear top-down design of MEMS resonators, based on their electrical specification, by the solution of the mechanical wave equation. In view of the central importance of thermal effects for the performance and stability of MEMS-based RF circuits, the temperature dependence was included in the model; the aim was to study the variations of the RF parameters of the resonators and to enable a temperature dependent MEMS oscillator simulation. The variations of the resonator parameters with respect to the ambient temperature were then verified by RF measurements in a vacuum chamber at temperatures between −35 ∘C and 85 ∘C. The systematic body of data revealed temperature coefficients of the resonant frequency between −26 ppm/K and −20 ppm/K, which are in good agreement with other data from the literature. Based on the MEMS resonator model derived, a MEMS oscillator was designed, simulated, and measured in a vacuum chamber yielding a measured temperature coefficient of the oscillation frequency of −26.3 ppm/K. The difference of the temperature coefficients of frequency of oscillator and resonator turned out to be mainly influenced by the limited Q-factor of the MEMS device. In both studies, the analytical model and the measurement showed very good agreement in terms of temperature dependence and the prediction of fabrication results of the resonators designed. This analytical modelling approach serves therefore as an important step towards the design and simulation of micro-electronics and micro-electromechanics in one uniform design process. Furthermore, temperature dependences of MEMS oscillators can now be studied by simulations instead of time-consuming and complex measurements.

An Analytical Electrothermal Model of a 1D Electrothermal MEMS Micromirror

A New Meshing Criterion for the Equivalent Thermal Analysis of GaAs PHEMT MMICs.

Macromodeling Of The Electrostatically Actuated Rectangle Plate Based On Modal Projection

Equivalent method of GaAs PHEMT MMIC for thermal simulation

Dynamic Thermal Characterization of MEMS Electrothermal Actuators in Air

Modeling and Analysis of A Mems-Based Thermal Emissivity Variable Thermal Control Device

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

One-Dimensional Thermal Analysis of the Flexible Electronic Devices Integrated with Human Skin.

Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors

Theoretical Modeling of Microscopic Photothermal Expansion and Experimental Study of Photothermal Microactuators

An Analytic Model of Transient Heat Conduction for Bi-Layered Flexible Electronic Heaters by Symplectic Superposition

Generalized Thermal Design Model for Comb-Capacitor Mems Devices Fabricated by Bonding-Drie Process: A Preliminary Framework

An efficient macro model for CMOS-MEMS thermal wind speed sensor

Numerical Modeling of the Performance of Thermoelectric Module with Polydimethylsiloxane Encapsulation

Thermal properties analysis of MEMS sensors by micro-grid method

Thermal Analysis on Active Heat Dissipation Design with Embedded Flow Channels for Flexible Electronic Devices

A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Theoretical Modelling and Experimental Study of Novel Photothermal Microactuators

Modeling Electrostatic MEMS Actuator