THz Transmittance and Electrical Properties of Silicon Doped Vanadium Dioxide Films Tuning by Annealing Temperature

Xuefei Wu,Zhiming Wu,Chunhui Ji,Zehua Huang,Jun Gou,Jun Wang,Yadong Jiang
DOI: https://doi.org/10.1117/12.2242776
2016-01-01
Abstract:Silicon doped vanadium dioxide (VO2) films were successfully prepared on high purity Si(111) substrate. Confirmed by X-ray diffraction, all samples showed a preference orientation of (011) direction. Introducing silicon led grain sizes decreasing comparing to undoped VO2 film, and this result induced a narrow hysteresis width in MIT performance. Furthermore, silicon doped VO2 films annealing in different temperature presented different phase transition properties. In the electrical, a higher annealing temperature resulted in a decrease of sheet resistance and lowering the transition temperature. In terahertz optical transmittance, silicon doped VO2 films keep an excellent modulation ratio, indicating a great potential in the application of terahertz modulator devices.
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