High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD(Invited)
Zhong Tiansheng,Yu Shunjie,Zhao Xiaolong,Ding Mengfan,Liang Fangzhou,Fang Shi,Zhang Zhongfang,Hou Xiaohu,Sun Haiding,Xu Guangwei,Hu Qin,Long Shibing
DOI: https://doi.org/10.3788/gzxb20215010.1004001
IF: 0.6
2021-01-01
ACTA PHOTONICA SINICA
Abstract:Complying with the trend of small size, multi-functionality, and high density integration of photoelectric detectors and arrays, a high-performance solar-blind and X-ray dual function detector basedon ultra-thin Ga2O3 was reported. Based on the metal-organic chemical vapor deposition, through fine tuning of growth at high temperature, a thin thickness (70 nm) of high-quality gallium oxide heteroepitaxial thin film is realized. Owing to the ultra-wide band gap of Ga2O3 and the high quality of the film, metal-semiconductor-metal structure photodetector based on this film has achieved a photo-to-dark current ratio of 5.5x10(7), detectivity of 4.65x10(15) Jones, external quantum efficiency of 3.53x10(4)%, and responsivity of 72.23 A/ W in solar-blind ultraviolet detection band. What's more, the above-mentioned solar-blind ultraviolet performances remain stable relatively at different solar-blind light intensities(14.7-548 mu W/cm(2)). While for X-ray detection, an ultra-high sensitivity of 1.91x10(4) mu C.cm(-2).Gy(-1) is achieved, which exceeds the previously reported Ga2O3 thin-film detectors under the equivalent thickness. Besides, the device can still achieve comprehensively high performance at a lower operating voltage. The improvement of film quality, ionization of intrinsic oxygen vacancies, and photoinduced Schottky barrier reduction effect etc. conribute to the excellent photoresponse performance of this Ga2O3 thin-film detectors under both solar-blind and X-ray illumination. Additionally, the cascade effect casused by the X-ray induced high-erergy electrons is another critial aspect for the high X-ray sensitivity of the device. This work provides potential inspirations for ultra-thin solar-blind and X-ray detectors with high performance and low power consumption in the future.