Low-Temperature-Crystallized Ga 2 O 3 Thin Films and Their TFT-Type Solar-Blind Photodetectors

Yu Pei,Lingyan Liang,Xiaolong Wang,Zhenhua Wang,Hengbo Zhang,Junyan Ren,Hongtao Cao

DOI: https://doi.org/10.1021/acs.jpclett.2c01852

2022-08-02

Abstract:Crystalline Ga(2)O(3) (c-Ga(2)O(3)) is a promising candidate for next-generation solar-blind photodetectors (SBPDs) but is suffering from high processing temperatures. Herein, seed-induced engineering is proposed via adopting Zn as an induced metal for crystallizing Ga(2)O(3), lowering the processing temperature by 200 °C. After annealing, the Zn/Ga(2)O(3) consists of an inner Ga(2)O(3) layer of a monoclinic crystalline phase, top ZnO crystals coming from Zn oxidation, and a thin corundum...

chemistry, physical,physics, atomic, molecular & chemical,nanoscience & nanotechnology,materials science, multidisciplinary