Preparation method of plastic metallic nano Cu/Ru multilayer film

Huang Ping,Zhou Qing,Wang Fei,Xu Kewei
2015-01-01
Abstract:The invention discloses a preparation method of a plastic metallic nano Cu/Ru multilayer film. Copper layers and ruthenium layers, with the same face-centred cubic structures, are formed by adopting a magnetron sputtering technique, controlling the copper layers and ruthenium layers, with different elements, to alternate and enabling the single layer thickness of the copper layers and ruthenium layers to be 1.5nm by adjusting the experiment parameters in the sputtering process, such as rotating speed and bias voltage. The close-packed hexagonal ruthenium layers are induced to convert to face-centred cubic phases by adding second phase of copper to brittle ruthenium phases. A film prepared by the method has a compact structure, and the structures of the ruthenium phases can be easily controlled by controlling the single layer film thickness, thus providing possibility for preparing ruthenium alloy materials with excellent plasticity. Meanwhile, the method is simple to operate, is lower in cost and is easy to implement and popularize industrially.
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