Method for evaluating adhesion property of Cu-serial metal nano-multilayer film material

Huang Ping,Zhou Qing,Wang Fei,Xu Kewei
2015-01-01
Abstract:The invention relates to a method for evaluating the adhesion property of a Cu-serial metal nano-multilayer film material. The method comprises the following step: measuring the length of an inter-membrane interface crack on the indentation section after loading to calculate the adhesion property of the metal nano-multilayer film material by taking a lamellar film sample as a test sample, using a strain rate controllable nanoindentation test device, using a nanoindentation device with a pressure head which is a triangular pyramid diamond pressure head, controlling the strain rate at 0.2/s and the indentation depth at 80% or over the thickness of the film. The method provided by the invention can be used for simply, conveniently and efficiently evaluating the adhesion property of the nano-multilayer film, thereby providing an effective path for evaluating the adhesion property of the nano-multilayer film.
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