Abstract:Electrothermal actuators are highly advantageous for microelectromechanical systems (MEMS) due to their capability to generate significant force and large displacements. Despite these benefits, their application in reconfigurable conduction line switches is limited, particularly when employing commercial processes. In DC MEMS switches, electrothermal actuators require electrical insulation between the biasing voltage and the transmission line to prevent interference and maintain the integrity of the switch. This work presents a chevron-type electrothermal actuator utilizing a stack of Al thin films on a silicon (Si) structural layer beam to create a DC MEMS switch. The design leverages a thin film Al heater to drive the actuator while the layer provides electrical insulation, suppressing crosstalk with the Si layer. The electrical contact resistance of a Si-to-Si interface was evaluated by applying a controlled current and measuring the resultant voltage. A low contact resistance of 150 Ω was achieved when an initial contact gap of 2.52 μm was closed using an actuator with an actuation voltage of 1.2 V and a current of 205 mA, with a switching speed of less than 5 ms. Factors such as the contact force, the temperature, and the residual device layer etching angle significantly impact the Si-to-Si contact resistance and the switch's longevity. The switch withstands a breakdown voltage up to 350 V at its terminal contacts. Thus, it will be robust to self-actuation caused by unwanted voltage contributions, making it suitable for high-voltage and harsh environment applications.

Design And Fabrication Of A Latching Silicon-Based Mems Switch

Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications

Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications

Design and Analysis of a Lateral Lateral DC-Contact MEMS RF Switch with High Performance

Electro-thermally actuated RF MEMS switch for wireless communication.

High-reliability Circular-Contact RF MEMS Switches in Silicon Hermetic Package

Design, Simulation and Fabrication of a Novel Contact-Enhanced MEMS Inertial Switch with a Movable Contact Point

Magnetostatic bistable MEMS switch with electrothermal actuators

Novel electro-thermal latching micro-switch based on Ni/electrophoretic polymer micro-cantilevers

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

A Low-Voltage Lateral MEMS Switch with High RF Performance

&Lt;title>study on DC-contact MEMS Switches</title>

Preparing of a High Speed Bistable Electromagnetic RF MEMS Switch

High-Isolation Contact Switch in Mems Phase Shifter

Low Voltage, High Speed and Small Area In-Plane MEMS Switch

Design and fabrication of X-band capacitive MEMS switches

A Highly Reliable Lateral MEMS Switch Utilizing Undoped Polysilicon As Isolation Material

Realization of A Series Contact Mems Switch with Sion Dielectric Bridge

Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘On’-State

Design and Fabrication of a Low Insertion Loss Capacitive RF MEMS Switch with Novel Micro-Structures for Actuation

Development of a Novel MEMS Inertial Switch with a Compliant Stationary Electrode