Chip-integrated 2-micrometer wavelength micro laser

Jiang Xiaoshun,Fan Huibo,Ding Yang,Xiao Min
2015-01-01
Abstract:The invention discloses a chip-integrated 2-micrometer wavelength micro laser. The chip-integrated 2-micrometer wavelength micro laser comprises a rare earth doping monox micro ring core cavity and a micro-nano fiber, wherein the micro-nano fiber is located on one side of the monox micro ring core cavity. The monox micro ring core cavity is prepared through the following steps that (1) a rare earth doping monox film is prepared on the surface of a silicon wafer through a sol-gel method; (2) a monox micro disc cavity is prepared on the surface of the monox film through a photoetching process and an etching process; (3) heating reflux treatment is carried out on the monox micro disc cavity through a carbon dioxide laser to obtain the monox micro ring core cavity. The 2-micrometer wavelength micro laser prepared through the sol-gel rare earth doping method has the advantages of being integrated in chip, micro, stable, low in threshold and the like, the energy mode volume in the cavity can be optimized according to the carbon dioxide laser reflux power and time, and a laser with a higher quality is obtained.
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