Chip integrated silicon oxide microsphere laser

Jiang Xiaoshun,Fan Huibo,Hua Shiyue,Xiao Min
2013-01-01
Abstract:The invention discloses a chip integrated silicon oxide microsphere laser which comprises a rare earth doped silicon oxide microsphere and micro fibers which are arranged on one side of the silicon oxide microsphere. The silicon oxide microsphere is prepared through steps: silicon oxide film doped with rare earth impurities is prepared on a silicon wafer surface through a sol-gel method, a silicon oxide micro disc is prepared on the surface of the silicon oxide film by a photo-etching or etching process, and the silicon oxide micro disc is subjected to heating and backflow by a carbon dioxide laser to obtain the silicon oxide microsphere. The silicon oxide microsphere laser prepared through sol-gel rare earth doping method has the advantages of micromation, low threshold value, stability, chip integration and the like.
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