Abstract:Erbium-doped fiber lasers exhibit high coherence and low noise as required for applications in fiber optic sensing, gyroscopes, LiDAR, and optical frequency metrology. Endowing Erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-noise fiber lasers to chip-scale form factor, and enable large-volume applications. Yet, while major progress has been made in the last decade on integrated lasers based on silicon photonics with III-V gain media, the integration of Erbium lasers on chip has been compounded by large laser linewidth. Recent advances in photonic integrated circuit-based high-power Erbium-doped amplifiers, make a new class of rare-earth-ion-based lasers possible. Here, we demonstrate a fully integrated chip-scale Erbium laser that achieves high power, narrow linewidth, frequency agility, and the integration of a III-V pump laser. The laser circuit is based on an Erbium-implanted ultralow-loss silicon nitride Si$_3$N$4$ photonic integrated circuit. This device achieves single-mode lasing with a free-running intrinsic linewidth of 50 Hz, a relative intensity noise of $<$-150 dBc/Hz at $>$10 MHz offset, and output power up to 17 mW, approaching the performance of fiber lasers and state-of-the-art semiconductor extended cavity lasers. An intra-cavity microring-based Vernier filter enables wavelength tunability of $>$ 40 nm within the C- and L-bands while attaining side mode suppression ratio (SMSR) of $>$ 70 dB, surpassing legacy fiber lasers in tuning and SMRS performance. This new class of low-noise, tuneable Erbium waveguide laser could find applications in LiDAR, microwave photonics, optical frequency synthesis, and free-space communications. Our approach is extendable to other wavelengths, and more broadly, constitutes a novel way to photonic integrated circuit-based rare-earth-ion-doped lasers.

On-chip erbium-doped lithium niobate microcavity laser

On-chip erbium-doped lithium niobate microring lasers

Coherent mode-combined ultra-narrow-linewidth single-mode micro-disk laser

An Erbium-Doped Lithium Niobate Micro-Cavity Laser

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Electro-optic tuning of a single-frequency ultranarrow linewidth microdisk laser

On-chip Lithium Niobate Heterogeneous Photonic Crystal Nanocavity Laser

Toward On-Chip Unidirectional and Single-Mode Polymer Microlaser

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

On-chip erbium-doped lithium niobate waveguide amplifiers

Integrated spiral waveguide amplifiers on erbium-doped thin-film lithium niobate

On-chip Lithium Niobate Microresonators for Photonics Applications

2.7 μm mid-infrared Er-doped thin-film LiNbO 3 -on-insulator photonic wire laser

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Electrically driven compact hybrid lithium niobate microring laser

A fully hybrid integrated Erbium-based laser

Efficient erbium-doped thin-film lithium niobate waveguide amplifiers

Erbium-ytterbium co-doped lithium niobate single-mode microdisk laser with an ultralow threshold of 1 uW

Monolithic tunable dual-wavelength laser utilizing erbium-doped lithium niobate on an insulator