Abstract:The invention relates to a method for preparing a uniform and controllable microlens structure by utilizing femtosecond laser. The method comprises the following steps of firstly, dissolving PMMA (Poly Methyl Methacrylatemethacrylic Acid) particles in methylbenzene, coating on a black acrylic plate, and curing so as to obtain a double-layer processing sample wafer; then constructing a light path,wherein the light path comprises a femtosecond laser, output light of the femtosecond laser is reflected by a first reflecting mirror, so that the light path is rotated for 90 degrees, reflected lightpasses through a damping piece, a diaphragm, a half-wave plate, a beam splitter prism, a shutter, a second reflecting mirror and a focusing objective lens in sequence and then is perpendicularly irradiated at the processing station of a movable objective table, and the femtosecond laser, the shutter and the movable objective table are connected with a computer; and then adjusting parameters of output laser of the femtosecond laser by using the computer, fixing the double-layer sample wafer to the processing station of the movable objective table, and controlling the movable objective table tomove by using the computer through the irradiation of the femtosecond laser. According to the method, the difference of the light absorption rate of the transparent PMMA layer and the black acrylic plate is used, so that an expansion area is separated from an absorption area, a microlens array structure is difficult to break, and the microlens array diameter and height controllable range is enlarged.

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