Abstract:This article reports a novel laser-induced micro-fabrication method and its monitoring system for three-dimensional (3D) microstructures. The mechanism of the method is that a small zone of thermoplastic material melted by laser heating grows in liquid surrounding environment, solidifying into a convex microstructure, such as micro-dot or micro-pillar. A laser diode (808 nm) with maximum power output of 130 mW is used as power source, and a kind of paraffin mixed with stearic acid and paint serves as the thermoplastic material for 3D microstructure formation experiments. A light microscope system consisting of a charge-coupled device (CCD) and a computer is utilized to realize real-time observation of the micro-fabricating process. The distribution of local temperature rise on material surface created by laser irradiation is simulated. The effects of liquid environment on microstructure formation have been theoretically analyzed and experimentally studied. Experiments are further carried out to investigate the relationship between laser spot and fabricated microstructures. The results indicate that the widths of microdots or micro-pillars are mostly determined by the size of focal spot, and their heights increase with the enlargement of laser power density. With this method, a micro-dot array of Chinese characters meaning "China" has been successfully fabricated through computer programming. This method has the advantages of implementing direct, mask-less, real-time and inexpensive 3D microstructure fabrication. Therefore, it would be widely applied in the fields of micro/nano-technology for practical fabrication of different kinds of 3D microstructures. Microsc. Res. Tech. 72:717-722, 2009. (C) 2009 Wiley-Liss, Inc.

Laser three dimensional preparing method of non spherical micro lens

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Micronano manufacturing method of compound eye structure micro lens array

Preparation of high precision aspherical lenses based on micro stereolithography technology

A New Diamond Machining Approach for Extendable Fabrication of Micro-Freeform Lens Array

Manufacturing method of compound eye lens with millimeter, micrometer and nanometer three-level structures

Single-pulse Writing of a Concave Microlens Array.

Fabrication of Micro-Lens Array on Convex Surface by Meaning of Micro-Milling

Micro lens and preparation method therefor, and experimental facility

3D microstructure manufacture method based on laser-induced thermoplastic expansion

3D Microstructure Manufacture Based on Laser-Induced Thermoplastic Expansion

Preparation method of glass rod surface micro-lens array

Method for preparing uniform and controllable microlens structure by utilizing femtosecond laser

Method for preparing micro-nano stamping stencil by femtosecond laser preparing

Variable focus convex microlens array on K9 glass substrate based on femtosecond laser processing and hot embossing lithography

Analysis Of Micro Lens Fabrication Via Femtosecond Laser

Fabrication of High Integrated Microlens Arrays on a Glass Substrate for 3D Micro-Optical Systems

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays

High-throughput 3D printing of customized imaging lens