Rapid Thickness Identification Methodology for Two-Dimensional MoS2 and In2 Se3 Nanosheets Using Optical Microscopy

Darren Wu,Qiu Li,Feifan Wang,Tiantian Li,Tingyi Gu
DOI: https://doi.org/10.1109/isec49744.2020.9397826
2020-01-01
Abstract:Problem StatementCurrently, identification methods for the thickness measurement of nanomaterials demand expensive and nonstandard equipment, impairing its continued study, practical applications, and industrial commercialization.The development of a novel and accurate thickness identification methodology is imperative for the continued study and potential commercialization of two-dimensional (2D) materials. Through experimentation, an effective and straightforward methodology has been produced for the thickness identification of MoS 2 and In 2 Se 3 nanosheets on 300nm Si/SiO 2 under optical microscopy from approximately single to decuple layer numbers. The optical contrast difference values of the atomically-thin nanostructures were collected throughout and arranged into a standard reference index which was correlated to height number in nanometers. Using this method, the thickness of a substance could be simply and accurately determined without the use of complex instrumentation, experimental setup, and calculation, therefore, saving time and financial costs.
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