Abstract:The number of layers of 2D materials is of great significance for regulating the performance of nanoelectronic devices and optoelectronic devices. This article reviews different optical methods to determine the thickness of 2D materials and further discusses the solution of the fusion of optical techniques and machine learning and the opportunities and challenges toward future applications. The number of layers of 2D materials is of great significance for regulating the performance of nanoelectronic devices and optoelectronic devices, where the optimal thickness of the target sample should be determined before further physical research or device manufacturing steps. At present, a variety of different optical technologies have been proposed to determine the thickness of samples by using the relationship between the number of layers and optical properties, including optical contrast, optical imaging, Raman spectra, photoluminescence spectra, nonlinear spectra, near‐field optical imaging, ellipsometry spectra, and hyperspectral imaging. In the past decade, the rapidly growing number of 2D materials and their heterostructures has exceeded the capacity of traditional experimental and computational methods. In recent years, machine learning (ML) is emerging as a powerful tool to support such traditional methods, which brings new opportunities to tap the potential of optical technology in a more perspicacious way. The application of optical technology has greatly facilitated the acquisition of optical information of materials, while ML algorithms provide a fast, high‐throughput, and intelligent way to complete back‐end data processing and inference. A profound integration of conventional optical technologies and ML algorithms significantly helps 2D materials progress in basic studies and practical applications and further promotes industrial manufacturing.

Thickness identification of two-dimensional materials by optical imaging.

Optical Contrast for Identifying the Thickness of Two-Dimensional Materials

Rapid and reliable thickness identification of two-dimensional nanosheets using optical microscopy.

Optical thickness identification of transition metal dichalcogenide nanosheets on transparent substrates.

Rapid Thickness Identification Methodology for Two-Dimensional MoS2 and In2 Se3 Nanosheets Using Optical Microscopy

Rapid and reliable thickness identification of two-dimensional nanosheets using optical microscopy

Rapid Thickness Identification Methodology For Two-Dimensional MoS<sub>2</sub> and In<sub>2</sub>Se<sub>3</sub> Nanosheets Using Optical Microscopy

Layer‐Number Dependent Optical Properties of 2D Materials and Their Application for Thickness Determination

Optical image-based thickness characterization of atomically thin nanomaterials using computer vision techniques

A Universal Approach to Determine the Atomic Layer Numbers in Two-Dimensional Materials Using Dark-Field Optical Contrast.

Determination of the Thickness of Two-Dimensional Transition-Metal Dichalcogenide by the Raman Intensity of the Substrate

Layer-number Determination of Two-Dimensional Materials by Optical Characterization

Thickness-Dependent Differential Reflectance Spectra of Monolayer and Few-Layer MoS2, MoSe2, WS2 and WSe2

Transmission-Matrix Quantitative Phase Profilometry for Accurate and Fast Thickness Mapping of 2D Materials

The Numerical-Aperture-Dependent Optical Contrast and Thickness Determination of Ultrathin Flakes of Two-Dimensional Atomic Crystals: A Case of Graphene Multilayers

Optical-based thickness measurement of MoO$_3$ nanosheets

Thickness Determination of Ultrathin 2D Materials Empowered by Machine Learning Algorithms

Thickness Identification of 2D Hexagonal Boron Nitride Thin Flakes by Optical Imaging in Dry Transfer Method

Thickness Mapping and Layer Number Identification of Exfoliated van der Waals Materials by Fourier Imaging Micro-Ellipsometry

Spectroscopic Metrics Allow in Situ Measurement of Mean Size and Thickness of Liquid-Exfoliated Few-Layer Graphene Nanosheets

Thermally Enhanced Optical Contrast of Graphene Oxide for Thickness Identification.