Abstract:We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz; SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20 <G <200 MW m(-2) K-1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, opto-electronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 mum. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3omega method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

Spatially Resolved Thickness Analysis Of Microscale Structures Using Micro-Raman Spectroscopy

Micro-Raman measurement of thickness in microelectromechanical silicon structures

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

Study of the Raman-Afm System for Simultaneous Measurements of Raman Spectrum and Micro/Nano-Structures

Simultaneous Thickness, Velocity, Density, and Attenuation Measurement of a Thin Layer by Time-Resolved Acoustic Microscopy

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

A novel high resolution contactless technique for thermal field mapping and thermal conductivity determination: Two-Laser Raman Thermometry

Spatially Resolved Determination of Thermal Conductivity by Raman Spectroscopy

Simultaneously Measuring Thickness, Density, Velocity and Attenuation of Thin Layers Using V(z,t) Data from Time-Resolved Acoustic Microscopy.

Applications of Micro-Raman Spectroscopy in Microelectronics

Frequency-resolved Raman Thermometry Analysis via a Multi-layer Heat Transfer Model for Bulk and Low-dimensional Materials

Thickness-Dependent Raman Scattering from Thin-Film Systems

Measurement of In-Plane Thermal Conductivity of Ultrathin Films Using Micro-Raman Spectroscopy

Microscale Spatially Resolved Thermal Response of Si Nanotip to Laser Irradiation

Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy

Suspended 2D Anisotropic Materials Thermal Diffusivity Measurements Using Dual-Wavelength Flash Raman Mapping Method

Rapid Thickness Identification Methodology for Two-Dimensional MoS2 and In2 Se3 Nanosheets Using Optical Microscopy

Micro-Raman spectroscopy measurement of stress in silicon

High-spatial-resolution composition analysis of micro/nano-structures with a nanoscale compositional variation