Impact of Interfacial Layer on the Switching Characteristics of HZO-based Ferroelectric Tunnel Junction

Haolin Li,Pengying Chang,Gang Du,Jinfeng Kang,Xiaoyan Liu
DOI: https://doi.org/10.1109/VLSI-TSA51926.2021.9440123
2021-01-01
Abstract:Current characteristics of Zr-doped HfO2 (HZO) based ferroelectric tunnel junction (FTJ) is simulated by WKB approximation. Different current mechanisms such as Fowler- Nordheim tunneling, direct tunneling and thermionic emission are included in the simulation. The impact of interfacial layer (IL) on the switching characteristics of FTJ is evaluated with various IL thickness, dielectric constant a...
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