Interface Engineering for Performance and Reliability Optimization of Hf0.5Zr0.5O2 FeFETs: Device Integration and Electrical Characterization

Xueyang Li,Yaxuan Yuan,Chengji Jin,Xinze Li,Xiao Yu,Bing Chen,Cheng Ran,Genquan Han
DOI: https://doi.org/10.1109/icicdt63592.2024.10717818
2024-01-01
Abstract:We report an integration and comprehensive study of the ozone SiO 2 /HfO 2 interfacial layer (IL) on Hf 0.5 Zr 0.5 O 2 (HZO) ferroelectric field-effect transistors (FeFETs). HZO FeFET with HfO 2 /SiO 2 IL, HfO 2 IL and no IL were fabricated to study the roles of HfO 2 and SiO 2 as ILs. HZO FeFETs with ozone SiO 2 /HfO 2 IL shows great advantages in off-leakage, memory window (MW) and interface trap density, since the HfO 2 layer can enhancement the polarization and the SiO 2 IL is ideal for interface with Si and electrical isolation. As SiO 2 IL greatly suppresses the interface traps, the degradation of MW and interface traps are also optimized with the ozone SiO 2 /HfO 2 IL technique for endurance cycles at a level of 10 4 , showing it an ideal IL engineering technique for the performance and reliability optimization of HfO 2 -based FeFETs.
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