Intrinsic Variations of Ultrathin Hafnium Oxide-Based Ferroelectric Tunnel Junctions Induced by Ferroelectric-Dielectric Phase Fluctuations

Pengying Chang,Mengqi Fan,Gang Du,Xiaoyan Liu,Yiyang Xie
DOI: https://doi.org/10.1007/s11432-022-3655-x
2023-01-01
Science China Information Sciences
Abstract:>Hafnium oxide(HfO 2 )-based ferroelectrics(FEs) are promising materials for low-power applications such as the Internet of Things and artificial neural network, due to their fully complementary-metal-oxide-semiconductor compatibility and advanced thickness scalability [1]. The ferroelectric tunnel junction(FTJ) developed by the integration of FE HfO 2 on Si/SiO 2 provides a feasible route to realize high-density and energy-efficient nonvolatile memory [2].
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